Transfert Plus, Societe En Commandite

Aeponyx Inc.

Université Du Québec À Montréal

Michaël Ménard

Fréderic Nabki

Francois Menard

Mohannad Elsayed

Martin Bérard

Optical spectroscopy is a widely used method to identify the chemical composition of materials and the characteristics of optical signals. Silicon based integrated photonics offers a platform for many optical functions through microelectromechanical systems (MEMS) and microoptoelectromechanical systems (MOEMS), silicon waveguides, integrated CMOS electronics and hybrid integration of compound semiconductor elements for optical gain. Accordingly, it would be beneficial to provide advanced optical tools for techniques such as optical spectroscopy and optical tomography exploiting MOEMS to provide swept filters that offer improved performance, increased integration, reduced footprint, reduced power consumption, increased flexibility, reconfigurability, and lower cost. Further, such MOEMS elements can support the provisioning of swept optical sources, swept filters, swept receivers etc. in the planar waveguide domain without free space optics.

Micro-motor based swept wavelength optical components

Hybrid optical integration places very strict manufacturing tolerances and performance requirements upon the multiple elements to exploit passive alignment techniques as well as having additional processing requirements. Alternatively, active alignment and soldering/fixing where feasible is also complex and time consuming with 3, 4, or 6-axis control of each element. However, microelectromechanical (MEMS) systems can sense, control, and activate mechanical processes on the micro scale. Beneficially, therefore the inventors combine silicon MEMS based micro-actuators with silicon CMOS control and drive circuits in order to provide alignment of elements within a silicon optical circuit either with respect to each other or with other optical elements hybridly integrated such as compound semiconductor elements. Such inventive MEMS based circuits may be either maintained as active during deployment or powered off once the alignment has been 'locked' through an attachment/retention/latching process.

Methods and systems for microelectronic packaging

Growing community of inventors

Verdun, Canada

Michaël Ménard