Swisslitho Ag

Michael Zientek

Armin W Knoll

Felix Holzner

Philip Paul

Colin Rawlings

A scanning probe nanolithography system comprising a probe to create nanostructures line () by line through writing said nanostructures () pixel by pixel along lines () on a sample. A positioning system is adapted to provide a positioning of the probe at a sequence of predetermined positions to the sample and its surface towards the probe and a control unit () is provided to control the positioning system for positioning the probe for a pixel-wise writing of said lines () through a writing unit. It further comprises a sensor unit adapted to detect a predetermined property of the written nanostructure (), the sensor unit being connected to the control unit to adapt the control signals to be provided to the writing unit for writing the following line () based on the measured signals () of the predetermined property.

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Zurich, Switzerland

Michael Zientek