Vat Holding Ag

Michael Zickar

Adrian Eschenmoser

Andreas Hofer

Alejandro Marzinotto

Frantisek Balon

Andre Gahler

Method for monitoring a state of a pin lifter device (), wherein the pin lifter device () is designed for moving and positioning a substrate in a process atmosphere region (P). The pin lifter device () has a coupling () and a drive unit () having an electric motor, which is designed and interacts with the coupling () in such a way that the coupling () is adjustable from a lowered normal position into an individual active position and back. The method for monitoring includes progressively receiving a present item of motor current information with respect to a motor current applied to the electric motor, comparing the present motor current information to an item of target current information, and deriving an item of state information based on the comparison.

Method for monitoring, determining the position of, and positioning a pin-lifting system

Vacuum adjustment device for an active element movable in a process atmosphere region, having a coupling, a drive unit having an electric motor, which cooperates with the coupling in such a way that the coupling can be adjusted from a normal position into an active position and back. The device has a mechanical interface for connecting the vacuum adjustment device to a process volume providing a process atmosphere, a dynamic separating device for separating the process atmosphere from an outer atmosphere region and a control and processing unit at least electrically connected to the drive unit and designed to control the electric motor. The control and processing unit is designed to derive motor state information based on the extent of a motor operating parameter, and has a pressure determination functionality designed in such a way that a load difference is derived by comparing the motor state information with a known motor target state, and a pressure difference between the outer atmosphere region and the process atmosphere region is derived on the basis of the load difference.

Adjustment device for a vacuum area with pressure measuring functionality

The invention relates to a vacuum process system for an evacuable vacuum process volume, a vacuum valve, a peripheral unit having a closed-loop and open-loop control unit. The vacuum valve includes a valve seat, with a valve opening and a first sealing surface; a valve closure, with a second sealing surface and a drive unit coupled to the valve closure. The valve closure can be varied to provide different valve opening states. The closed-loop and open-loop control unit can perform multiple execution of a process cycle with control of the peripheral unit at least in part to execute a control cycle providing a deliberate variation or setting of the valve opening state by controlling the drive unit on the basis of a currently determined controlled variable for a process parameter and on the basis of a target variable and can be performed with a certain temporal relation.

Advanced vacuum process control

Disclosed is a vacuum valve having at least one acoustic sensor, the acoustic sensor being designed such that information can be generated by the acoustic sensor via a structure-borne sound wave, as a measuring signal, impacting on at least one component of the vacuum valve.

Vacuum valve with acoustic sensor

A valve () having at least one closure member () for closing a valve opening () and at least one valve rod (), at least one first connecting section () being provided in or on the valve rod (), at least one second connecting section () being provided in or on the closure member (), and the closure member being fastenable or fastened to the valve rod by the connection of the first connecting section to the second connecting section. The first connecting section () and/or the second connecting section () has/have at least one pressure chamber () for a fluid, this chamber being delimited by at least one elastically deformable boundary wall () and the boundary wall can be elastically deformed by the fluid provided in the pressure chamber () in order to form a clamped connection of the first connecting section () to the second connecting section ().

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Englburg, Switzerland

Michael Zickar