Intel Corporation

Apple Inc.

Michael Y Chan

Patrick R Morrow

Kevin O'Brien

Mauro J Kobrinsky

Sarah E Kim

Shriram Ramanathan

Thomas N Marieb

Michael C Harmes

Scott List

Mark L Doczy

Robert L Bristol

R Scott List

Yu S Yang

Clayton K Chan

Ranjith Samuel E John

Adam C Abrahamsen

Madhan M Raj

Nazneen N Jeewakhan

LED donor substrates and conductive architectures for on-wafer testing are described. In an embodiment, an array of LEDs is supported by an array of electrically conductive stabilization posts. The electrically conductive stabilization posts can be coupled with a test pad for on-wafer testing prior to transferring the LEDs to a receiving substrate.

Conductive micro LED architecture for on-wafer testing

Three-dimensional stacked substrate arrangements with reliable bonding and inter-substrate protection.

Three-dimensional stacked substrate arrangements

A method for cleaning optics in a chamber. The method can include introducing a first etchant into a chamber that encloses an optical component and a source of electromagnetic radiation that is suitable for lithography, ionizing the first etchant, and removing debris from a surface of the optical component.

In-situ cleaning of light source collector optics

According to one embodiment a method is disclosed. The method includes applying a photoresist layer to a first wafer, etching the first wafer, bonding the first wafer to a second wafer and thinning the first wafer; wherein an unsupported bevel portion of the first wafer is removed.

Bonded wafer processing method

A method and system for cleaning collector optics in a light source chamber. In producing, for example, extreme ultraviolet light for lithography, debris such as tungsten can accumulate on optical components near a light source in the light source chamber. An etchant, such as a fluorine-containing gas, can be introduced into the light source chamber. The etchant is ionized via electrodes to generate free fluorine. The electrodes can be, for example, existing light source chamber components including the optical components. The fluorine can then react with the debris, forming gaseous compounds, which are pumped out of the light source chamber.

Growing community of inventors

Sunnyvale, CA, United States of America

Michael Y Chan