Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Novellus Systems Incorporated (1 from 993 patents)
1 patent:
1. 6673716 - Control of the deposition temperature to reduce the via and contact resistance of Ti and TiN deposited using ionized PVD techniques