National Technology & Engineering Solutions of Sandia, LLC

Sandia Corporation

Michael Wiwi

Thomas A Friedmann

Roy H Olsson

Khalid Mikhiel Hattar

Todd Bauer

Brian D Homeijer

Blythe G Clark

Sara Jensen Homeijer

Stuart B Van Deusen

Michael David Henry

Paul J Resnick

Matt Eichenfield

Benjamin Griffin

Travis Ryan Young

James Kenneth Douglas

Sean Yen

Jeremy Moore

Camille Padilla

Robert William Reger

Bryson Barney

Andrew Ian Young

There is provided a near-zero-power wakeup system in which a MEMS sensor for mechanical or acoustic signals is coupled to a very-low-power complementary metal oxide semiconductor (CMOS) application-specific integrated circuit (ASIC). Power consumption can be minimized by operating the ASIC with sub-threshold gate voltages.

Low-power MEMS wakeup system

A microelectromechanical systems (MEMS) accelerometer that has high sensitivity to motion along the z axis is discussed. The device includes two symmetrical sets of bilateral, diametrically opposed high aspect ratio flexures that tether a movable proof mass to the frame of the device. The flexures are designed in such a way as to restrict movement of the proof mass along the x and y axes but readily allow motion along the z axis. More specifically, when the device experiences an acceleration along the x or y axes, the proof mass is restricted from moving because some of the bilateral, diametrically opposed flexures are in compression and others are in tension.

High sensitivity single-axis MEMS accelerometer with bilateral flexures

An optical second-harmonic generator (or spontaneous parametric down-converter) includes a microresonator formed of a nonlinear optical medium. The microresonator supports at least two modes that can be phase matched at different frequencies so that light can be converted between them: A first resonant mode having substantially radial polarization and a second resonant mode having substantially vertical polarization. The first and second modes have the same radial order. The thickness of the nonlinear medium is less than one-half the pump wavelength within the medium.

Second harmonic generation in resonant optical structures

A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal.

Single crystal micromechanical resonator

The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.

Single crystal micromechanical resonator and fabrication methods thereof

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Albuquerque, NM, United States of America

Michael Wiwi