Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Cabot Microelectronics Corporation (1 from 297 patents)
2. Cmc Materials, Inc. (1 from 33 patents)
2 patents:
1. 12116502 - Self-stopping polishing composition and method for high topological selectivity
2. 8916061 - CMP compositions selective for oxide and nitride with high removal rate and low defectivity