Carl Zeiss Industrielle Messtechnik Gmbh

Rf360 Singapore Pte. Ltd.

Michael Wick

Thomas Engel

Nils Haverkamp

Stefan Leopold Hatzl

Manuel Hofer

Juergen Portmann

Xavier Perois

Jeroen Bielen

Hans-Joachim Frasch

A multi-level stacked AW filter package including a first acoustic wave (AW) filter stacked on a second AW filter employs semiconductor fabrication methods and structures, including a metallization layer comprising interconnects to couple a contact surface to the second AW filter. Each AW filter includes an AW filter circuit on a semiconductor substrate. A second substrate disposed on a frame on the substrate protects the AW filter circuit. In a multi-level AW filter package, the second substrate of the first AW filter comprises a glass substrate with a similar expansion rate as the semiconductor substrate. The interconnects coupling the second AW filter to the contact surface are disposed on insulators on the side wall surfaces of the semiconductor substrates of the first AW filter for isolation. In a stacked AW filter package comprising a single AW filter, the interconnects couple the contact surface to the AW filter.

Multi-level stacked acoustic wave (AW) filter packages and related fabrication methods

The present invention relates to a method for simulating an image recording by an optical sensor of a coordinate measuring machine for inspecting a measurement object, comprising the following steps: providing a first data set representing a model of the measurement object, a second data set representing a model of an illumination of the measurement object, and a third data set representing a model of an optics of the optical sensor, and rendering an image stack on the basis of the first data set, the second data set and the third data set, wherein the image stack has a plurality of virtual images of at least one partial region of the measurement object, wherein each virtual image is rendered at least with a different second and/or different third data set. Furthermore, the present invention relates to a method for optimizing an image recording by a coordinate measuring machine.

Image recording simulation in a coordinate measuring machine

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Munich, Germany

Michael Wick