Mykrolis Corporation

Brooks Instrument, LLC

Michael W Fortner

Christopher George Reed

Joseph Sipka

Shiyuan Cheng

Dwight S Larson

Daryl Buchanan

A monolithic manometer and method of sensing pressure changes may include sensing a change in parasitic capacitive coupling between multiple parasitic capacitive coupled conductive elements in response to a diaphragm disturbing the parasitic capacitive coupling between the conductive elements. A signal representative of the sensed change in parasitic capacitive coupling may be output.

Monolithic vacuum manometer utilizing electrostatic interference as a means of detection

Systems and methods for determining differential currents in a pair of circuits. In a preferred embodiment, an excitation voltage and a tightly coupled differencing current transformer are coupled to a differential capacitance manometer to generate a differential current. This differential current is input to a low-impedance summing node of a charge amplifier that effectively integrates the differential current. A shielding structure surrounding the current transformer and amplifier is driven to the excitation voltage potential. The output of the charge amplifier is passed through a common mode transformer which is coupled to the excitation voltage source in order to remove the guard potential (corresponding to the excitation signal) from the output signal. A synchronous detector then converts the resulting signal to a DC level indicative of the differential capacitance of the sensor.

Electronic interface for use with dual electrode capacitance diaphragm gauges

A system and method for regulating the temperature of a sensor to reduce temperature gradients that form within the sensor. In one embodiment, the temperature gradients are reduced utilizing a temperature regulator with two controlled zones that surround a variable capacitance sensor. Measurements are made for the ambient temperature of at least one of the two temperature controlled zones, and the temperature differential between the two temperature controlled zones. The temperature regulator then adjusts the temperature of the two controlled zones based upon this differential in order to minimize the existing temperature gradient.

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Plano, TX, United States of America

Michael W Fortner