Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Ifu Diagnostic Systems Gmbh

Michael Vergöhl

Udo Bringmann

Bernd Szyszka

Tobias Zickenrott

Andreas Pflug

Stefan Bruns

Daniel Rademacher

Christoph Rickers

Hans-Ulrich Kricheldorf

Thomas Melzig

André Kaiser

Niels Malkomes

Christina Polenzky

Thomas Neubert

Günter Bräuer

Oliver Werner

Ralf Bandorf

Till Wallendorf

Thomas Höing

Ralf Pöckelmann

The invention relates to a method for producing layers with very good uniformity in coating systems with horizontally rotating substrate guiding. Alternatively, certain layer thickness gradients can be set. The particle loading is also significantly reduced. The service life is much higher compared to other methods. Parasitic coatings are reduced. The coating rate is also increased.

Method for producing layers with improved uniformity in coating systems with horizontally rotating substrate guiding

According to the invention, a device is provided for coating substrates having planar or shaped surfaces by means of magnetron sputtering, by means of which device surfaces having any shape, for examples lenses, aspheres or freeform surfaces which have an adjustable layer-thickness profile, can be coated such that a layer function is maintained on the substantially complete surface. A method for coating substrates having planar or shaped surfaces by means of magnetron sputtering is also provided.

Device and method for coating substrates having planar or shaped surfaces by means of magnetron sputtering

The invention relates to a device and a method for producing layers whose layer thickness distribution can be adjusted in coating systems with horizontally rotating substrate. A very homogeneous or a specific non-homogeneous distribution can be adjusted. The particle loading is also significantly reduced. The service life is significantly higher compared to other methods. Forming of parasitic coatings is reduced.

Device and method for producing layers with improved uniformity in coating systems with horizontally rotating substrate and additional plasma sources

The invention relates to the deposition of optical precision films with high uniformity, precision, particle freedom and low absorption on the substrate. For this purpose, a method and a device are proposed. The approach is the use of target materials and also possibly of surfaces in the sputtering field. Particularly high uniformity and also particularly low residual absorption are achieved with these materials. The invention is suitable for the production of optical thin-film filters, as are used for example in laser material machining, laser components, optical sensors for measuring technology, or in medical diagnostics.

Method and device for producing uniform films on moving substrates and films produced in this way

The invention relates to methods and devices for producing one or more low-particle layers on substrates in a vacuum. The layers are deposited onto the substrate from a cylindrical source material, optionally together with a reactive gas component, by means of magnetron sputtering. The layer is deposited against the force of gravity in a sputter-up method. During the method or within the device, the structure or stochiometric atomic composition of the layers can optionally be modified using a plasma source. Multiple sputtering sources with different source materials can be provided in the device such that multiple layers of different compositions can be applied on the substrate at a high speed in one process.

Method and apparatus for producing low-particle layers on substrates

A measuring device for quantitative determination of optical characteristic values for detecting photo- and/or electrochemical decomposition reactions taking place on surfaces of photocatalytically active substrates.

Measuring device and method for determining optical characteristic variables for verifying photochemical and electrochemical degradative reactions

The invention relates to a layered system of a component that can be thermally stressed, comprising at least one for expanding the application scope of layered systems and in particular for improving their life cycle. Said layer has at least one first and at least one second material and a mixture profile () that varies at least almost continuously with the layer thickness, without forming a boundary layer between the first and second material.

Temperature-resistant layered system

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Braunschweig, Germany

Michael Vergöhl