Leica Microsystems Semiconductor Gmbh

Leica Microsystems Jena Gmbh

Vistec Semiconductor Systems Gmbh

Leica Microsystems Wetzlar Gmbh

Michael Veith

Lambert Danner

Uwe Graf

Joachim Wienecke

Martin Osterfeld

Edgar Maehringer-Kunz

Wolfgang Vollrath

Franz Cemic

Robert Mainberger

Frank Eisenkr&auml;mer

Volker Knorz

An illuminating device, as for a microscope, includes a light source and a reflecting filter system. The beam of light of the light source undergoes a plurality of reflections in the reflecting filter system. The entering beam of the reflecting filter system has an optical beam offset and/or a change in direction relative to the exiting beam.

Illuminating device

The invention refers to a setting module for an illumination apparatus () of an optical instrument (), in particular of a microscope, in which the illumination apparatus () comprises a light source (), an illuminating optical system, and positioning elements () with which the position of the light source () and/or of the illuminating optical system within the illumination apparatus () can be modified. The setting module () comprises a module housing () having at least one drive device () and coupling members () for the transfer of a drive motion to the positioning elements (). Also described is an illumination system comprising the illumination apparatus and the setting module. The result is to create an alignment capability with excellent functionality and user-friendliness, thereby making possible rapid positional adjustment of the light source and/or the illuminating optical system in the context of use under clean-room conditions.

Setting module for the illumination of an optical instrument

An autofocus module for a microscope-based system includes at least two light sources, each of which generates a light beam for focusing. An optical directing device is provided that directs a respective portion of each light beam onto an incoupling means, which couples each of the light beams into the illuminating light beam of the microscope-based system and directs the light beams onto a specimen. A first and a second detector receive the light beams of the first and second light source reflected from the surface of the specimen, and ascertain the intensities on the first and second detector in time-multiplexed fashion.

Autofocus module and method for a microscope-based system

An arrangement for illuminating a specimen field in an optical instrument for specimen viewing includes: an illumination device, arranged in a housing, including a light source and an illuminating optical system, where a position of the light source or illuminating optical system is adjustable within the illumination device; a setting device including at least one drive system and configured to positionally adjust the light source or illuminating optical system; at least one linkage member connected to the light source or illuminating optical system, where the linkage member includes a coupling member accessible by the setting device from outside the housing; at least one measurement device configured to sense parameters of the light generated by the illumination device; and a control device that is configured to generate positioning commands for positional adjustment of the light source or illuminating optical system by the drive system as a function of the sensed parameters.

Arrangement and method for illuminating a specimen field in an optical instrument

A method and an apparatus are described for the optical examination of structured surfaces of objects, especially of wafers and/or masks. The optical apparatus has an observation beam path ( ) whose central axis ( ) is directed vertically against the surface of the object ( ), an illumination beam ( ) whose central ray ( ) falls vertically on the surface of the object, and an illumination beam ( ) whose central ray ( ) falls obliquely onto the surface of the object ( ). In the observation beam path ( ) the image of the surface of the object ( ) is observed and/or detected. In the observation beam path ( ) a filter device ( ) and/or detector device ( ) is disposed. The optical system has an illumination device ( ) for the simultaneous production of a dark field illumination, a device for the coding ( ) of the illumination beams ( ) being associated with the bright field ( ) and/or the dark field illumination beam ( ).

Method and device for optically examining structured surfaces of objects

An illumination device for a DUV microscope has an illumination beam path, proceeding from a DUV light source in which are arranged a condenser and a reflection filter system which generates a DUV wavelength band and comprises four reflection filters. At these, the illumination beam is reflected in each case at the same reflection angle &agr;, the illumination beam path extending coaxially in front of and behind the reflection filter system. According to the present invention, the reflection angle &agr;&equals;30&deg; and the DUV wavelength band &lgr; &plus;&Dgr;&lgr; has a half-value width of max. 20 nm and a peak with a maximum value S of more than 90% of the incoming light intensity. The resulting very narrow half-value width of the DUV wavelength band makes it possible for the DUV objectives of the DUV microscope to be very well-corrected.

Growing community of inventors

Wetzlar, Germany

Michael Veith