International Business Machines Corporation

Michael V Grazioso

Jerome J Cuomo

Stanley Joseph Whitehair

Gary S Selwyn

John E Heidenreich, Iii

Charles R Guarnieri

Kurt L Haller

A process chamber having voltage driven electrodes, e.g. plasma chamber, can be made self cleaning of particle contamination by appropriate design of the workpiece or electrode surface to provide protuberances, grooves or tapers thereon which result in a predetermined pattern in the electrostatic potential within the process chamber which can trap particulate contamination in preselected regions within the plasma chamber. These particles can then be channeled out of the process chamber through a pump port.

Growing community of inventors

Wappingers Falls, NY, United States of America

Michael V Grazioso