Carl-zeiss-stiftung

Carl-zeiss-smt Ag

Carl Zeiss Nts Gmbh

Z/i Imaging Gmbh

Carl Zeiss Smt Gmbh

Michael Trunz

Hubert Holderer

Bernhard Gellrich

Christian Wagner

Bernhard Geuppert

Franz Sorg

Erik Essers

Michael Muehlbeyer

Erich Merz

Heinz Broghammer

Guenter Maul

Ralf Hilgers

Bernhard Trier

Karlfried Osterried

Michael M&uuml;hlbeyer

Klaus-Dieter G&ouml;tz

Frank Marianek

Markus Kasparek

Christof Hangleiter

Peter R&uuml;mmer

Kerstin Von Nessen-Lapp

Hugo Timmers

Thomas Polzer

Albert Post

Johan Dries

Peter Ruemmer

Roland Dipl-Ing Gischa

Cornelia R&ouml;sch

Bernhard Dipl-Ing Gellrich

Michael Ebert

Karlheinz Schuster

Johann Huell

An optical arrangement with a light source includes an optical element that is fastened in a mount. The light source emits radiation and the optical element is acted on thereby such that the heat that results lacks symmetry corresponding to the shape of the optical element. A connecting structure is provided between the optical element and the mount and has a symmetry that does not correspond to the shape of the optical element and effects an at least partial homogenization of the temperature distribution in the optical element.

Optical arrangement and projection exposure system for microlithography with passive thermal compensation

An arrangement for holding a particle beam apparatus such as a transmission electron microscope. The arrangement is sufficient for receiving a good resolution in the area of 1 &#x212b; or less, said arrangement still being under more or less no influence of the environment, in particular, building vibrations. In one embodiment, the arrangement comprises a base structure comprising a plurality of hollow bodies, at least one of said hollow bodies having a first length extension in a first direction, a second length extension in a second direction and a third length extension in a third direction, said first length extension being larger than said second and third length extensions, and wherein a cross section of said at least one of said hollow bodies perpendicular to said first direction is substantially triangular. Due to the hollow body shape, a very stiff structure is provided with a very good eigenfrequency.

Arrangement for holding a particle beam apparatus

The invention relates to a camera system, especially for photogrammetric applications. The camera system contains at least two first cameras ( ), which are inclined towards each other so that the optical axes ( ) of the first cameras ( ) intersect at a common point of intersection ( ). The camera system also has at least two second cameras ( ) which are located at a distance from the first cameras ( ), in the viewing direction of the first cameras ( ). The inclination of the optical axes ( ) of the first cameras ( ) towards each other provides an area (b) in which the envelope that surrounds the acceptance cones of the first cameras ( ) has an essentially constant diameter. The second cameras ( ) are located in this area (b) so that the second cameras ( ) avoid truncating the projection of the visual fields of the first cameras ( ). The first cameras are preferably panchromatic and the second cameras polychromatic.

Camera system having at least two first cameras and two second cameras

A coordinate measuring apparatus includes a bending-resistant measuring table configured as a ribbed hollow body.

Coordinate measuring apparatus having a bending-resistant measuring table

A device for the low-deformation support of an optical element ( ), in particular of an end plate of a lens in a projection printing system for semiconductor elements, is provided with a mount ( ), the optical element ( ) being connected to the mount ( ) at least partly via a bonding layer which is located between the adjacent circumferential walls ( ) of mount ( ) and optical element ( ). The mount ( ) is provided with at least three bearing feet ( ) which are distributed over the circumference and on which the optical element ( ) rests. The bonding layer is located in an annular gap ( ) between the adjacent circumferential walls ( ) of mount ( ) and optical element ( ) over at least one section thereof.

Device for the low-deformation support of an optical element and method for the low-deformation support of the optical element

An assembly is provided with a mount ( )and an optical element ( ). The optical element ( ) is connected via elastic connecting elements directly or via one or more intermediate elements to the mount ( ). The connecting elements have at least one membrane-like joining element ( ), which is connected in the outer region to the mount ( ) or to the intermediate element and in the inner region is connected via a rigid, moment-transferring connection ( ) to the optical element ( ).

Assembly comprising an optical element and a mount

An assembly comprising an optical element and a mount has a fastening flange an intermediate element in at least approximately the form of a funnel and an inner ring The optical element is mounted in the inner ring which is connected to the fastening flange via the intermediate element The intermediate element is connected on the side with the smaller diameter to the inner ring and on the side with the greater diameter to the fastening flange

In a method of straightening the supporting surfaces ( ) of supporting elements ( ) for optical elements ( ), in particular in lens systems of microlithography projection exposure equipment, the supporting elements ( ) and/or at least one bearing part ( ) connected to the supporting elements ( ) for the optical elements ( ) are deformed by a laser beam (A, B, C, D) produced by a laser ( ) in such a way that the supporting surfaces ( ) are at least approximately aligned with a common supporting plane or some other prescribed distribution.

Method of straightening the supporting surfaces of supporting elements for optical elements

An adjustable assembly comprises a base (mount ring,), an adjustable part (inner ring,), a lever (tilting lever,) and a drive (drive element,). The lever (tilting lever,) is connected to the base (mount ring,) and to the adjustable part (inner ring,) via two elastic solid pivoting joints (,) oriented in parallel. One of the two solid pivoting joints (,) is divided into two pivoting joint parts (,), which are arranged such that along their pivoting axis (,) they are offset sideways on either side of the second solid pivoting joint (,).

Adjustable assembly

Assembly of an optical element and a mount, in which the optical element is coupled by means of numerous lugs to a rigid intermediate ring, which itself is coupled by adjusting members or passive decouplers to the mount for connection to a housing and/or to a further mount.

Assembly of optical element and mount

The invention relates to a composite body which is assembled from at least two bodies. The first body is made of a first material and the second body of a second material and each of the two bodies has at least one joining surface. The joining surfaces lie opposite each other and the bodies are joined to each other by at least one adhesive connection. At least one recess for a compensating body made of a third material is introduced into at least one of the two joining surfaces. This compensating body is connected with at least one adhesive location or gluing gap to both bodies. An adhesive ensures an adhesive connection between the compensating body and the two bodies at the adhesive location.

Composite body

An optical imaging device, particularly an objective, is provided with at least one optical element, which is mounted in an inner ring, the inner ring being connected to an outer mount. A manipulator device serves for the displacement of the optical element in at least one direction that is perpendicular to the optical axis. By a system of peripheral slots between the inner ring and the outer mount with connecting members situated therebetween, a rotary joint between the inner ring and the outer mount, and at least one displacing rotary joint with an adjusting member between the inner ring and the outer mount as the manipulator device, a displacement of the optical element is attained with low deformation or controlled deformation of the optical element. The inner ring and the outer mount are preferably constituted monolithically.

Optical imaging device, particularly an objective, with at least one optical element

A structure includes a cover body having a plate-like shape and a support body of open light-weight structure composed of struts, connecting nodes and support points. Attachment locations are spatially separated one from the other and the cover body and the support body are bonded at these locations.

Positioning table

The invention relates to a composite body which is assembled of at least two bodies. The first body is made of a first material and the second body is made of a second material. Each of the two bodies has at least one connecting surface and these connecting surfaces are mutually adjacent. The two connecting bodies are wrung upon each other on at least one connecting surface. The two connecting surfaces are connected to each other by wringing and on at least one of these two surfaces, one or more recesses are provided for an adhesive location or an adhesive gap. An adhesive ensures an additional adhesive connection of the two connecting surfaces at the adhesive location between the two bodies. These recesses of the adhesive locations lie at least essentially in the wringing surface.

Growing community of inventors

Ellwangen, Germany

Michael Trunz