Carl Zeiss Smt Gmbh

Carl-zeiss-smt Ag

Carl Zeiss Sms Ltd.

Carl Zeiss Industrielle Messtechnik Gmbh

Carl Zeiss Vision International Gmbh

Asml Netherlands B.v.

Carl Zeiss Microscopy Gmbh

Carl Zeiss Ag

Carl Zeiss Meditec Gmbh

Carl Zeiss Industrial Metrology, LLC

Michael Totzeck

Toralf Gruner

Daniel Kraehmer

Heiko Feldmann

Damian Fiolka

Olaf Dittmann

Karl-Heinz Schuster

Wolfgang Singer

Aksel Goehnermeier

Hans-Juergen Mann

Vladimir Kamenov

Susanne Beder

Markus Schwab

Ralf Mueller

Nils Dieckmann

Wilfried Clauss

Ulrich Stroessner

Joern Greif-Wuestenbecker

Wilhelm Ulrich

Johannes Wangler

Aurelian Dodoc

Jochen Hetzler

Helmut Beierl

Alexandra Pazidis

Bernd Geh

Olaf Conradi

Markus Brotsack

Markus Zenzinger

David R Shafer

Ulrich Wegmann

Ulrich Loering

Hartmut Enkisch

Martin Schriever

Stephan Muellender

Thomas Scheruebl

Markus Mengel

Gerd Klose

Norbert Kerwien

Thomas Glöge

Dirk Juergens

Wolfgang Harnisch

Markus Haidl

Christian Wald

Birgit Enkisch

Marcin B Bauza

Bernhard Von Blanckenhagen

Norbert Rosenkranz

Michael Ricker

Skip Miller

Diana Spengler

Alexander Epple

Matthew J Everett

Thomas Kalkbrenner

Markus Hauf

Johannes Ruoff

Bernhard Geuppert

Hans-Juergen Rostalski

Stefan Hembacher

Lars Stoppe

Michael Hartl

Ralf Meschenmoser

Hans-Jürgen Mann

Rudolf Von Buenau

Paul Graeupner

Ulrich Matejka

Michael Arnz

Oliver Schwarz

Helmut Haidner

Uwe Wolf

Matthias Hillenbrand

Hans-Jochen Paul

Thomas Milde

Jeremias Gromotka

Gerhard Fuerter

Jochen Straub

Martin Wegener

Lars Omlor

Muzammil A Arain

Vladan Blahnik

Dirk Doering

Christoph Hilmar Graf Vom Hagen

Reiner Garreis

Christian Holzner

Juergen Huber

Philipp Jester

Patrick Scheible

Beate Boehme

Manfred Dahl

Bernd Borrmann

Matthias Barnert

Rainer Schmidt

Werner Mueller-Rissmann

Gerhart Fuerter

Vladimir Kamenow

Vladimer Kamenov

Danny Krautz

Christoph-Hilmar Graf Vom Hagen

Claus Hermannstaedter

Markus Birkhold

Robert Zarnetta

A 3D printing apparatus for manufacturing a workpiece has a first radiation source to carry out a non-linear absorption polymerization and a second radiation source to carry out optical coherence tomography. A first beam path is traversed by the first radiation and a second beam path is traversed by the second radiation. The first and second beam paths are formed completely independently of one another. Further, a 3D printing method for manufacturing a workpiece, another 3D printing apparatus, and methods for analyzing the quality of a raw material of a non-linear absorption polymerization; checking an orientation of a substrate to be printed by non-linear absorption polymerization; determining a spatially resolved degree of conversion of a non-linear absorption polymerization; analyzing a structural sharpness of a structure produced by non-linear absorption polymerization; and for three-dimensional reconstruction of a workpiece manufactured by non-linear absorption polymerization are disclosed.

3D printing apparatus and 3D printing method for manufacturing a workpiece

A method and an arrangement for producing a workpiece using additive manufacturing techniques involve pre-process, in-process and post-process measurement in order to determine individual characteristics of one or more workpiece layers. In particular, dimensional and/or geometrical characteristics of a workpiece layer are measured before the next workpiece layer is produced. Advantageously, production parameters are controlled in response to individual material characteristics determined prior to the production process. Also advantageously, measurement results are fed back into a production process in order to increase accuracy, reliability, repeatability and precision of the production process.

Adaptive closed-loop control of additive manufacturing for producing a workpiece

Methods and devices for additive manufacturing of workpieces are provided. For analysis during production, a test is carried out using a selected test method. The test results are compared with simulated test results derived during a simulation of the manufacturing and testing. The test may use one or more of a laser ultrasound test unit, an electronic laser speckle interferometry test unit, an infrared thermography test unit, or an x-ray test unit.

Method and device for additive manufacturing utilizing simulation test results of a workpiece

An optical system includes an illumination module configured to illuminate a sample object with at least one angle-variable illumination geometry. The optical system includes an imaging optical unit configured to produce an imaged representation of the sample object that is illuminated with the at least one angle-variable illumination geometry on a detector. The optical system includes the detector, which is configured to capture at least one image of the sample object based on the imaged representation. The optical system includes a controller configured to determine a result image based on a transfer function and the at least one image. A method includes illuminating a sample object with at least one angle-variable illumination geometry, imaging the sample object on a detector, based on the imaged representation, capturing at least one image of the sample object, and, based on a transfer function and the at least one image, determining a result image.

Material testing by angle-variable illumination

An optical coherence tomography (OCT) system () is used to inspect bonding points (A,B,C) sandwiched between two materials (layersof e.g. displays). The OCT differentiates between a bonding point, e.g. a weld, and air gaps between the two materials. The bonding points are identified as breaks in the air gap between the materials. By extracting various physical characteristics of the bonding points and the gap between the two materials, the present system determines whether the bonding is faulty.

Inspection of bonding quality of transparent materials using optical coherence tomography

A process, in particular a 3D printing process, for producing a spectacle lens is disclosed. The process includes providing a coated substrate, providing a three-dimensional model of the spectacle lens, digitally cutting the three-dimensional model into individual two-dimensional layers, providing at least one printing ink, typically a 3D printing ink, building up the spectacle lens from the sum of the individual two-dimensional layers with a printing operation on the substrate, and hardening of the spectacle lens. The hardening can take place completely or partially after application of individual volume elements or after application of a layer, and the partial hardening can be completed after conclusion of the printing process.

3D printing process for producing a spectacle lens

A refractive optical component has a main body with a plurality m of optical layers extending between a front side and a back side, each layer having a thickness, wherein each of the layers extends over a region common to all layers, the common region being greater than the maximum thickness of the respective layer by at least a factor of 10, wherein the thickness of the layers varies over the extent thereof transversely to the principal axis, and wherein the main body has a refractive index curve (n=n(x, y, z)), modulated at least in the direction parallel to the principal axis, with a plurality of maxima and minima, a distance between adjacent maxima and minima ranging between 0.5 &#x3bc;m and 100 &#x3bc;m and a refractive index difference &#x394;n between adjacent maxima and minima ranging between 10and 0.3.

Refractive optical component and spectacle lens produced therefrom, method for producing a refractive optical component, computer program product, construction data of a spectacle lens stored on a data medium, device for additive

The invention relates to an apparatus and a method for determining a defocussing value (&#x394;z, &#x394;z, &#x394;z) for at least one image feature in an image, wherein at least one monochromatic image of an object is generated, wherein the defocussing value (&#x394;z, &#x394;z, &#x394;z) is determined on the basis of the image and depending on the wavelength (&#x3bb;) of the monochromatic image, and a method and apparatus for image-based determination of a dimensional size.

Method and apparatus for determining a defocusing valve and for image-based determination of a dimensional size

A spectacle lens contains, starting from the object-sided front surface of the spectacle lens to the opposite rear-side of the spectacle lens, at least a) one component A including an ultrathin glass, b) one component B including at least one polymer material and/or at least one mineral glass, c) one component C, including at least one functional layer and/or an ultra-thin glass. A method for producing such a spectacle lens is also disclosed.

Spectacle lens and method for producing same

A method of operating a projection exposure tool for microlithography is provided. The projection exposure tool has a projection objective for imaging object structures on a mask into an image plane using electromagnetic radiation, during which imaging the electromagnetic radiation causes a change in optical properties of the projection objective. The method comprises the steps of: providing the layout of the object structures on the mask to be imaged and classifying the object structures according to their type of structure, calculating the change in the optical properties of the projection objective effected during the imaging process on the basis of the classification of the object structures, and using the projection exposure tool for imaging the object structures into the image plane, wherein the imaging behavior of the projection exposure tool is adjusted on the basis of the calculated change of the optical properties in order to at least partly compensate for the change of the optical properties of the projection objective caused by the electromagnetic radiation during the imaging process.

Method of operating a projection exposure tool for microlithography

An illumination optical unit for microlithography illuminates an object field with illumination light. The unit includes a first facet mirror that has a plurality of first facets, and a second facet mirror that has a plurality of second facets. The unit has facet pairs which include respectively a facet of the first facet mirror and a facet of the second facet mirror which predefine a plurality of illumination channels for illuminating the object field. At least some of the illumination channels have in each case an assigned polarization element for predefining an individual polarization state of the illumination light guided in the respective illumination channel.

Microlithography illumination system and microlithography illumination optical unit

A test sample device for an optical microscope which images a sample in different light states with a local resolution in the subwavelength range of the visible spectral range, wherein the test sample device comprises: a test piece, which is designed to be microexamined with the microscope and has a surface on which nanostructures are arranged, wherein each nanostructure, viewed along the surface, has a dimension in the subwavelength range, wherein the nanostructures are spaced apart from one another by an amount which lies above the wavelength of the visible spectral range, and wherein the nanostructures are switchable collectively between a bright state, in which they illuminate, and a dark state, in which they do not illuminate, and a drive, which is designed to move the test piece in the subwavelength range, whereby the different light states can be realized by different movement states of the test piece.

Test sample device and test method for an optical microscope with subwavelength resolution

A microscope is provided for space-resolved measurement of a predetermined structure. The microscope includes a source of radiation, which emits electromagnetic radiation of a predetermined wavelength, an optical system, which irradiates the electromagnetic radiation onto the structure to be measured and images the structure, irradiated with the electromagnetic radiation, onto a detector. The optical system has two eigen polarization conditions, and the optical system includes a polarization module by which a polarization condition can be set for the electromagnetic radiation of the source of radiation, the polarization conditions corresponding to the eigen polarization conditions.

Microscope and microscopy method for space-resolved measurement of a predetermined structure, in particular a structure of a lithographic mask

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Schwaebisch Gmuend, Germany

Michael Totzeck