Carl Zeiss Smt Gmbh

Other

Carl-zeiss-smt Ag

Michael Thier

Toralf Gruner

Markus Hauf

Eric Eva

Jochen Weber

Ulrich Schoenhoff

Arif Kazi

Payam Tayebati

Alexander Sauerhoefer

Ole Fluegge

Gerhard Focht

Aksel Goehnermeier

Burkhard Speit

Alexandra Pazidis

Dirk Hellweg

Stefan Wiesner

Tilmann Heil

Ewald Moersen

Hexin Wang

Harry Bauer

Thure Boehm

Jens Ullmann

Joerg Kandler

Annette Muehlpfordt

Christoph Zazcek

Jens Luedecke

Hans-Josef Paus

Frank Richter

The disclosure relates to an optical element configure to at least partial spatially resolve correction of a wavefront aberration of an optical system (e.g., a projection exposure apparatus for microlithography) to which optical radiation can be applied, as well as related systems and methods.

Optical element and method

The disclosure relates to an optical correction device with thermal actuators for influencing the temperature distribution in the optical correction device. The optical correction device is constructed from at least two partial elements which differ with regard to their ability to transport heat. Furthermore, the disclosure relates to methods for influencing the temperature distribution in an optical element.

Optical correction device

A method and a device for decontaminating optical surfaces, in particular for decontaminating the surfaces of beam-guiding optics employing UV-radiation in a cleansing atmosphere. The wavelength of the UV-radiation employed falls within a range where oxygen strongly absorbs and the cleansing atmosphere has an oxygen concentration less than that of air. The method and device have application to, e.g., cleaning the surfaces of the beam-guiding optics of microlithographic projection-exposure systems.

Method and device for decontaminating optical surfaces

A method of making a fracture-resistant large-size calcium fluoride single crystal is described, which is suitable for an optical component for radiation in the far UV range. The calcium fluoride raw material for the single crystal is first melted and subsequently solidified by cooling the melt to form a single crystal. However the calcium fluoride raw material is doped with from 1 to 250, preferably 1 to 100, ppm of strontium, preferably added as strontium fluoride, and contains from 1 to 10 ppm of sodium as well as up to 100 ppm of other impurities.

Method of making a fracture-resistant calcium fluoride single crystal and its use

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Moegglingen, Germany

Michael Thier