Nanoscribe Gmbh

Baden-wurttemberg Stiftung Ggmbh

Nanoscribe Holding Gmbh

Michael Thiel

Martin Hermatschweiler

Holger Fischer

Timo Gissibl

Harald Gießen

Joerg Hoffmann

Yann Tanguy

Roman Reinhard Reiner

Fabian Niesler

Philipp Simon

Marc Hippler

The invention relates to a method and a device for producing at least one microstructure () on an axial end () of an optical fiber (). The method comprises the following steps: &#x2014;providing (S) the optical fiber (); &#x2014;wetting (S) the axial end () of the optical fiber () with photoresist (); &#x2014;orienting (S) the optical fiber () and a writing beam of a 3D printer with respect to one another; &#x2014;forming (S) the at least one microstructure () by exposing the photoresist () to light with the aid of the 3D printer.

Method and device for producing microstructures on optical fibers

A method for producing a three-dimensional structure () in a lithographic material () that can be polymerized and thus solidified using energy input methods, wherein initially a shell wall () of the three-dimensional structure () to be produced is polymerized so as to form a polymerized shell wall () such that a volume () of unpolymerized lithographic material is enclosed using a first, spatially resolving energy input method, wherein the lithographic material () surrounding the polymerized shell wall () is removed in an intermediate development step, wherein subsequently the volume () enclosed by the shell wall () is polymerized using a second energy input method.

Method for producing a three-dimensional structure

The invention relates to a method for producing a structure in a lithographic material, wherein the structure in the lithographic material is defined by means of a writing beam of an exposure device, in that a plurality of partial structures are written sequentially, wherein for writing the partial structures a write field of the exposure device is displaced and positioned sequentially and that a partial structure is written in the write field in each case, and wherein for positioning of the write field a reference structure is detected by means of an imaging measuring device. For calibration of the write field in the respectively positioned write field, before, during or after writing a partial structure, at least one reference structure element assigned to this partial structure is produced in the lithographic material with the writing beam, wherein the reference structure element after the displacement of the write field is detected by means of the imaging measuring device for writing a further partial structure.

Method for producing a structure

A method for the spatially resolved introduction of an intensity pattern of electro-magnetic radiation by at least one optic display system into a photosensitive substance having properties which can be changed by photon exposure. These properties include a first, liquid and at least one second state, with the electro-magnetic radiation being conducted via the optic display system into the photosensitive substance and here being projected on predetermined spatial coordinates, in order to create at or in an area of these spatial coordinates a change of the properties of the substance. A surface of an objective lens of the optic display system, through which the electro-magnetic radiationis emitted, is immersed in the liquid photosensitive substance. A corresponding device is provided, and the device and method can be used for the creation of micro or nano-scaled structures.

Method and device for a spatially resolved introduction of an intensity pattern comprising electro-magnetic radiation into a photosensitive substance as well as applications thereof

A method for producing three-dimensional microstructures in which a source material is applied on a substrate, with a property changing by exposure with electromagnetic radiation. A three-dimensional source structure is written via spatially-resolving exposure in the source material, the source material is removed except for the source structure, and the source structure is molded with a target material, from which the microstructure to be produced is made. Here, a shell structure is provided surrounding the microstructure to be produced, with the source structure being created as the shell structure or the shell structure is produced using the source structure, and subsequently the target material is inserted into the shell structure.

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Karlsruhe, Germany

Michael Thiel