Globalfoundries Inc.

Michael T Templeton

Ramkumar Subramanian

Bharath Rangarajan

Khoi A Phan

Ursula Q Quinto

The present invention provides a system and methodology for dummy-dispensing resist though a dispense head while mitigating waste associated with the dummy-dispense process. The dummy dispensed resist is returned to a reservoir from which it was taken. Between substrate applications, the dispense head can be positioned to dispense resist into a return line. The flow of resist from the dispense head keeps resist from drying at the dispense head. By funneling the dummy-dispensed resist into a return line with low volume, for example, waste from the dummy-dispensing process can be mitigated.

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Atherton, CA, United States of America

Michael T Templeton