Forschungszentrum Karlsruhe Gmbh

Michael Stuber

Helmut Holleck

In a method of manufacturing a composite material structure consisting of a substrate with a layer of essentially pure sp.sup.2 - and sp.sup.3 -hybridized carbon with a sp.sup.3 -hybridized carbon proportion which increases toward the surface of the carbon layer, the carbon layer is deposited on the substrate by a PVD process using a magnetron sputtering apparatus in a process chamber in which an argon partial pressure of 0.6 to 1.0 pa is maintained and, during the carbon deposition, a bias voltage is maintained which is increased with increasing thickness of the layer from 0 to 300 volts.

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Karlsruhe, Germany

Michael Stuber