Engineering Measurements Company

Flowpro, LLC

Michael Steinbach

Charles E Miller

Louis T Yoshida

John F Waers

A vortex shedding flowmeter has a vortex sensor with a cantilever mounted transducer vane comprising a piezoelectric polymer film laminated together with an elastic substrate and that is encapsulated in an elastomeric integument to enable the transducer vane to withstand vortex pressure fields that span more than three orders of magnitude with sensitivities that provide high turn down ratios.

Vortex shedding flowmeter with wide dynamic range piezoelectric vortex sensor

A micro-mass flow controller (,) has a sonic choked flow restriction (,) with an oscillatable valve (,) for repetitiously opening and closing the sonic choked flow restriction (,) in a time-modulated sequence to set or vary mass flow rate of gas through the sonic choked flow restriction (,) over a period of time to something between no flow and maximum mass flow rate. A bimorph piezoelectric actuator (,) is coated in a sputtered dielectric layer (,) and then encapsulated in stainless steel or other metal cladding (,). A closure member (,) on the actuator (,) is registered to a valve seat (,) by actuating the actuator (,) to force the closure member (,) in a puddle of adhesive (,) against the valve seat (,) until the adhesive (,) cures.

Valve closure seating method and apparatus

A vortex detector comprises a generally cylindrical housing or body that defines a flow passage extending from an upstream end to a downstream end. A vortex generator disposed diametrically across the cylindrical housing near the upstream end of the cylindrical housing and oriented substantially perpendicular to the longitudinal central axis of the flow passage generates a vortex street in a fluid flowing in the flow passage. The vortex street created by the vortex generator impacts a vane located downstream of the vortex generator and connected at one end to the cylindrical housing substantially spans the flow passage diametrically and substantially parallel to the vortex generator such that vibrations or motion are generated in the vane. The end of the vane connected to the housing includes an area of reduced thickness that acts as a resilient, elastic hinged joint for the motion of the vane. Strain gauge transducers in the area of reduced thickness detect deflections or vibrations of the vane caused by the vortices and produce electric signals having amplitudes and frequencies that are related to the strengths and frequencies of the passing vortices.

Vortex detector and flow meter

A micro-mass flow controller (10) has a sonic choked flow restriction (28) with an oscillatable valve (26) for repetitiously opening and closing the sonic choked flow restriction (28) in a time-modulated sequence to set or vary mass flow rate of gas through the sonic choked flow restriction (28) over a period of time to something between no flow and maximum mass flow rate. A bimorph piezoelectric actuator (40) is coated in a sputtered dielectric layer (78) and then encapsulated in stainless steel or other metal cladding (80). A closure member (46) on the actuator (40) is registered to a valve seat (70) by actuating the actuator (40) to force the closure member (46) in a puddle of adhesive (86) against the valve seat (70) until the adhesive (86) cures.

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Longmont, CO, United States of America

Michael Steinbach