Pfeiffer Vacuum Gmbh

Michael Schill

Jan Hofmann

Tobias Stoll

Mirko Mekota

Bernhard Koch

Uwe Leib

Siamak Rafii

Marco Antonacci

Sönke Gilbrich

A vacuum pump, in particular to a turbomolecular pump, has a pump inlet, a pump outlet and a pump space for a gas to be pumped arranged between the pump inlet and the pump outlet, and at least one cooling gas inlet for a cooling gas for cooling the vacuum pump, the pump further having one or more hollow regions for the cooling gas connected in a gas conducting manner to the cooling gas inlet and arranged outside the pump space, wherein the or each hollow region is bounded by at least one component of the vacuum pump to be cooled.

Vacuum pump

A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.

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Asslar-Bechlingen, Germany

Michael Schill