Carl Zeiss Smt Gmbh

Carl Zeiss Multisem Gmbh

Carl Zeiss Laser Optics Gmbh

Michael Schall

Jeffrey Erxmeyer

Johannes Kraus

Michel Le Maire

Ulrich Weber

Holger Muenz

Vitaliy Shklover

Markus Bauer

Willi Anderl

Konstantin Forcht

Horst Feldermann

Ingrid Schuster

Oliver Gloeckl

Ute Heinemeyer

Dirk Zeidler

Joerg Jacobi

Horst Schade

Matthias Krantz

Arvind Shah

A system combination includes a particle beam system and a light-optical system. The particle beam system can be an individual particle beam system or a multiple particle beam system. A light entry mechanism can provided at a branching site of a beam tube arrangement within a beam switch. A light beam of the light-optical system can enter into the beam tube arrangement through the light entry mechanism such that the light beam impinges, in substantially collinear fashion with particle radiation, on an object to be inspected. Parts of the light-optical beam path and parts of the particle-optical beam path can extend parallel to one another or overlap with one another. This arrangement can allow light of the light-optical system to be incident in perpendicular fashion on an object to be inspected, optionally without impairing the particle-optical resolution of the particle beam system.

System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination

A beam reverser module for an optical power amplifier of a laser arrangement comprises at least one reflecting surface for receiving an incoming laser beam propagating in a first direction and reflecting the incoming laser beam into a second direction different from the first direction, wherein the at least one reflecting surface is a highly reflecting surface of at least one mirror.

Beam reverser module and optical power amplifier having such a beam reverser module

In order to make possible both good laser resistance and good antireflection properties, an optical element, in particular for UV lithography, comprising a substrate and a coating on the substrate having at least four layers, is proposed, wherein

Optical element

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Essingen, Germany

Michael Schall