Leybold Aktiengesellschaft

Nice Solar Energy Gmbh

Michael Schafer

Alfred Henn

Michael Pisch

Ralf Sorgenfrei

Georg Voorwinden

Matthias Gang

Jens Schuster

A measuring assembly and method for layer thickness measurement of a layer applied to a substrate by means of a vapor deposition method includes a measuring head which is provided with at least one vibration plate, an extraction line which can be coupled in a gas-conducting or vapor-conducting manner with a first end having a vacuum chamber for the vapor deposition method and which can be coupled in a gas-conducting or vapor-conducting manner with an opposite second end having the measuring head, wherein the extraction line includes at least one heating section or at least one cooling section.

Apparatus and method for layer thickness measurement for a vapor deposition method

An apparatus for opening and closing a bottom tap opening in a vacuum induction melting and casting furnace with a movable closing body, a plug rod for example, and a drive unit for the displacement of the closing body, the closing body being made of ceramic material and connected by levers to a coupling element, which has a compression spring to limit the maximum closing force of the closing body, and is displaceable by an electric motor drive.

Tap closure for a vacuum-induction melting and casting furnace

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Altenstadt, Germany

Michael Schafer