Honeywell International Inc.

Michael S Sutton

Mark W Weber

Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode out-of-plane from and proximate a first side of a first proof mass between a first voltage and a second voltage at a first frequency. The method also includes oscillating a voltage on a second sense electrode out-of-plane from and proximate a second side of the first proof mass between the first voltage and the second voltage at the first frequency and 180 degrees out-of-phase with the voltage on the first sense electrode. The method also includes generating a rate signal corresponding to a rotation rate of the first proof mass by first demodulating an out-of-plane signal from the first proof mass at the first frequency and second demodulating the out-of-plane signal in phase with in-plane motion of the first proof mass.

Oscillating voltage of sense electrodes in a MEMS tuning fork gyroscope

Systems and methods for insuring successful initiation of a resonating micro-electro mechanical systems (MEMS). An example system includes a resonating sensor, a drive device, a charge amplifier, and a voltage gain circuit. At start up, the charge amplifier and voltage gain circuit receives signals from the resonating sensor, compensates this signal for DC offsets, and generates a clock signal for the drive, thus placing the resonating sensor in a steady state operating mode. The circuit includes a plurality of gain switches that are toggled to produce a glitch in the signal associated with the received signal. The glitch overcomes the DC offset. A comparator generates the clock signal for the drive device if a signal associated with the received signal exceeds a reference signal.

Systems and methods to overcome DC offsets in amplifiers used to start resonant micro-electro mechanical systems

A two-axes rate sensing MEMS system. The system includes two proof masses, two drive components, two drive sense components, two orthogonal sets of substrate electrodes, and a processing device. The processing device is in signal communication with the two proof masses, the two sense components, or the two sets of substrate electrodes. The processing device determines the rate of rotation about two orthogonal axes based on signals received from the two proof masses, the two sense components, or the two substrate electrodes. Rotation about one axis will induce proofmass motion in the plane of the substrate. Rotation about an orthogonal axis will induce proofmass motion out-of-plane of the proofmasses. The sensing scheme independently detects these proof mass motion, which can infer rate of rotation.

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Wellington, CO, United States of America

Michael S Sutton