Honeywell G.m.b.h.

Honeywell International Inc.

Michael S. Liu

Curtis H. Rahn

Roger L. Roisen

John B. Straight

Michael S Liu

Harry H L Liu

Jerry C Yue

Kalluri R Sarma

Paul S Fechner

Keith W Golke

Roger L Roisen

Cheisan J Yue

Curtis H Rahn

Bradley J Larsen

John B Straight

Romney R Katti

Shankar Sinha

Harry Liu

Eric E Vogt

Gordon Alan Shaw

Anuj Kohli

Owen J Hynes

David K Nelson

Obert N Tufte

Gary R Gardner

Jeffrey S Haviland

Huang-Joung Chen

Kalluri R Sharma

Bernd Hoefflinger

Regis J Betsch

James C Lai

Ka-Lun Lo

David J Swanson

Harry Hl Liu

A radiation hardened memory element includes at least two delay elements for maintaining radiation hardness. In an example, the memory element is an SRAM cell. Both delays are coupled together in series so that if either one of the delays fails, a delay will still be maintained within the SRAM cell. The critical areas of the delays may be positioned so that a common line of sight cannot be made between each delay and a circuit node.

Radiation-hardened memory element with multiple delay elements

A method of increasing the radiation hardness of a semiconductor device using a modified high density plasma oxide (MHDPDX) film is described. In the method a high density plasma (HDP) process is used to deposit the MHDPDX film. During the HDP process, the silicon source gas to oxygen source gas ratio is chosen so as to deposit an excess silicon content within the MHDPDX film. The MHDPDX film is then annealed to cause the excess silicon to migrate and amalgamate, creating silicon nanoclusters having an average size of about 3-5 nm. The rad-hard properties of conventional BPSG films and various MHDPDX films are then compared.

Method of fabricating total dose hard and thermal neutron hard integrated circuits

Non-planar SOI devices that include an 'area-efficient' body tie are disclosed. The device includes a bulk substrate, an insulator layer formed on a surface of the bulk substrate, and a silicon body formed on a surface of the insulator layer. The silicon body preferably includes (i) a non-planar channel connecting a source region and a drain region, and (ii) a body tie that is adjacent to the channel and couples the channel to a voltage potential. The device further includes a gate dielectric formed on the channel and a gate material formed on the gate dielectric.

Non-planar silicon-on-insulator device that includes an 'area-efficient' body tie

A method and apparatus for regulating photocurrents is described. A photocurrent regulator may include a transistor having an associated cross-sectional area. The photocurrent regulator is coupled between an integrated circuit and a voltage source. When a dose rate event occurs within the integrated circuit, the photocurrent regulator, via the cross-sectional area, regulates a recombination path to the voltage source. Consequently, photocurrents within the integrated circuit are regulated, preventing permanent damage within the integrated circuit.

Method and apparatus for regulating photo currents induced by dose rate events

Behaviors of a transistor during a dose rate event can be modeled using a circuit simulation software package. A subcircuit model replaces a transistor in a circuit design to be simulated. The subcircuit model can be in the form of a schematic-based representation or a netlist. The subcircuit model provides a model of a source junction and a drain junction in the transistor during the dose rate event. The subcircuit model also includes the size of the transistor being replaced and the dose rate of the dose rate event. Once the transistor is replaced with the subcircuit model, a dose rate simulation may be performed to determine the dose rate hardness of the circuit design.

Simulating a dose rate event in a circuit design

A device is connected in parallel with an MTJ structure of an MRAM bit to shunt photocurrent away from and/or limit voltage across the MTJ structure during a dose rate event. The device may include at least one transistor and/or at least one diode. One device may be used to protect an entire row and/or column of MRAM bits. As a result, the MRAM bits are protected during a dose rate event.

System and method for hardening MRAM bits

A method and system is disclosed for reducing proton and heavy ion SEU sensitivity of a static random access memory (SRAM) cell. A first passive delay element has been inserted in series with an active delay element in a first feedback path of the SRAM cell, and a second passive delay element has been inserted in a second feedback path of the SRAM cell. The passive delay elements reduce the proton SEU sensitivity of the SRAM cell, and the active delay element reduces the heavy ion sensitivity of the SRAM cell. The passive delay elements also protect the SRAM cell against SEUs that may occur when the SRAM cell is in dynamic mode.

Proton and heavy ion SEU resistant SRAM

A random access memory cell has first and second inverters each having an input and an output. The input of the first inverter is coupled to the output of the second inverter by a Schottky-diode-free MOSFET. The input of the second inverter is coupled to the output of the first inverter.

SEU resistant SRAM using feedback MOSFET

A pair of complementary MOSFET's having regions of a common conductivity type separating the source and drain regions thereof which are provided on a support structure formed of an electrical insulating layer on a semiconductor material base. MOSFET's has a gate oxide layer on which is provided a gate semiconductor structure, with these structures each being of a common conductivity type and located across the gate oxide layers from the corresponding common conductivity type region.

Semiconductor on insulator devices

A back-etch silicon-on-insulator SOI process that has a silicon handle wafer with an oxide layer bonded at room temperature to a silicon device wafer with an etch stop and silicon device layer. The surfaces that are bonded at room temperature are first conditioned to be hydrophilic. After bonding, the edges of the layers are sealed. The silicon device wafer, the etch-stop layer and the device layer are boron doped. Most of the silicon device wafer is ground away. Then, the remaining portion of the silicon device wafer and the etch stop layer are chemically etched away, thereby leaving a uniform layer of silicon device layer on the oxide layer of the silicon handle wafer. Because the bonding, grinding and selective etching are performed at room temperature, inter-diffusion of the boron between the various layers is prevented and thus permits the selective etching process to result in a nearly perfect silicon device layer in terms of an even-surfaced, defect-free and thin layer on the buried oxide layer of silicon handle wafer. The resulting SOI wafer is then annealed at a high temperature, prior to device processing.

SOI substrate fabrication

A transistor panel used for active matrix display devices includes islands of single crystal silicon formed on a transparent quartz substrate and arranged in rows and columns, with an NMOS transistor formed in each island. Each transistor includes source, drain and channel regions and an isolated pixel reference voltage region. A silicon body tie connects the channel region to the pixel reference voltage region and acts as a current sink for unwanted carriers thereby greatly increasing the snapback voltage. A metallization extends to each transistor and is in contact with each reference voltage region to form a body tie buss. The portion of the body tie that overlaps the pixel electrode may be sized to provide a storage capacitor for improved display performance. The unique body tie design obviates the need for a separate light shield layer, provides a dramatically increased aperture ratio and is compatible with normal high temperature silicon processes.

High resolution active matrix LCD cell design

A rapid method for determining electrical characteristics of SOI wafers whereby the silicon substrate acts as a gate and tungsten probes make a source and drain connection at the top silicon surface to form a point contact transistor. Drain current is measured as a function of gate voltage as gate voltage is swept from negative to positive values. The subthreshold voltage current characteristic exhibits a minimum drain current occurring close to zero gate voltage. The tungsten probe point contacts apparently are responding to both electron and hole conduction or simply intrinsic CMOS behavior. Using current voltage characteristics, estimates may be made of interface state density and oxide charge density. Analysis of the gate voltage shift for minimum drain current allows determination of threshold voltage shift due to radiation.

Method for electrically characterizing the insulator in SOI devices

A method for making a voltage linear capacitor for use with a metal oxide semiconductor field transistor wherein a capacitor portion of an SOI substrate is heavily doped with phosphorus. The thin oxide layer used for the transistor gate oxide also serves as the capacitor dielectric and the thickness of the dielectric relative to the gate oxide is controlled.

Method of making linear capacitors for high temperature applications

A method for fabricating an integrated infrared sensitive bolometer having a polycrystalline element whereby an oxide region deposited on silicon nitride covered with a first polysilicon layer which is etched to provide a location for a bolometer element. A second polysilicon layer is deposited and doped to achieve a desired temperature coefficient of resistivity of 1 to 2%/.degree.C. The second polysilicon layer forms an IR sensitive element over the oxide region. Openings are etched in the IR sensitive element to permit an etchant to remove the oxide region resulting in the sensitive element being suspended over a cavity.

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Bloomington, MN, United States of America

Michael S Liu