Lam Research Corporation

Novellus Systems Incorporated

Michael Rumer

Michal Danek

Gary B Lind

Karl Frederick Leeser

Kaihan Abidi Ashtiani

Ronald Allan Powell

Vincent Burkhart

Kapil Umesh Sawlani

Peter John Woytowitz

Vinayakaraddy Gulabal

Tom Dorsh

Ravi Vellanki

Manjunath Satyadevan

Michael Kwok Leung Ng

Jack Griswold

David E Reedy

Paul D Healey

Michael Ng

Reed W Rosenberg

A heat shield structure for a substrate support in a substrate processing system includes an outer shield configured to surround a stem of the substrate support. The outer shield is further configured to define an inner volume between the outer shield and an upper portion of the stem and a lower surface of the substrate support and a vertical channel between the outer shield and a lower portion of the stem of the substrate support. The outer shield includes a cylindrical portion, a first lateral portion extending radially outward from the cylindrical portion, an angled portion extending radially outward and upward from the first lateral portion, and a second lateral portion extending radially outward from the angled portion.

Preventing deposition on pedestal in semiconductor substrate processing

A system includes a camera mounted external to and adjacent to a window of a processing chamber configured to process semiconductor substrates. The window allows the camera to view a component in the processing chamber. The camera is configured to generate a video signal indicative of a status of the component during a process being performed in the processing chamber. The system further includes a controller coupled to the processing chamber. The controller is configured to control the camera, process the video signal from the camera, determine the status of the component based on the processing of the video signal, and determine whether to terminate the process based on the status of the component.

In-situ chamber clean end point detection systems and methods using computer vision systems

A substrate support for a substrate processing system is provided and includes a body and mesas. The mesas are distributed across and extending from and in a direction away from the body. The mesas are configured to support a substrate. Each of the mesas includes a surface area that contacts and supports the substrate. Areal density of the mesas monotonically increases as a radial distance from a center of the substrate support increases.

Substrate support with increasing areal density and corresponding method of fabricating

Nitrogen-doped tungsten films characterized by low stress (e.g. less than 250 MPa) and excellent adhesion to an underlying dielectric layer are deposited by physical vapor deposition (PVD). The films can be used as hardmask layers in fabrication of 3D memory stacks and can be deposited directly onto a top dielectric layer in a stack of layers. The low stress films are characterized by higher concentration of nitrogen at the interface with the dielectric layer than in the bulk of the film, and have a nitrogen content of between about 5-20% atomic. The films having a thickness of between about 300-900 nm can be deposited in a PVD process chamber by forming a plasma in a process gas comprising a noble gas and nitrogen, where the flow rate of nitrogen is between about 10-17% of the total flow rate of the process gas.

Physical vapor deposition of low-stress nitrogen-doped tungsten films

A physical vapor deposition sputtering process for enhancing the &#x3c;0002&#x3e; preferred orientation of a titanium layer uses hydrogen before or during the deposition process. Using the oriented titanium layer as a base layer for a titanium, titanium nitride, aluminum interconnect stack results in formation of an aluminum layer with predominant &#x3c;111&#x3e; crystallographic orientation which provides enhanced resistance to electromigration. In one process, a mixture of an inert gas, usually argon, and hydrogen is used as the sputtering gas for PVD deposition of titanium in place of pure argon. Alternatively, titanium is deposited in a two-step process in which an initial burst of hydrogen is introduced into the reaction chamber in a separate, first step. Pure argon is used as the sputtering gas for the titanium deposition in a second step. The method is broadly applicable to the deposition of metallization layers.

PVD deposition process for enhanced properties of metal films

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Santa Clara, CA, United States of America

Michael Rumer