USA As Represented by Secretary of the Navy

Michael Robert Hontz

Karl D Hobart

Travis J Anderson

Andrew D Koehler

Alan G Jacobs

Daniel G Georgiev

Matthew Porter

Mona A Ebrish

Prakash Pandey

Tolen Michael Nelson

Raghav Khanna

A hybrid edge termination structure and method of forming the same. The hybrid edge termination structure in accordance with the invention is based on a junction termination extension (JTE) architecture, but includes an additional Layer of guard ring (GR) structures to further implement the implantation of dopants into the structure. The hybrid edge termination structure of the invention has a three-Layer structure, with a top Layer and a bottom Layer each having a constant dopant concentration in the lateral direction, and a middle Layer consisting of a plurality of spatially defined alternating regions that exhibit the electrical properties of either the top or bottom layer. By including the second layer, a discretized varying charge profile can be obtained that approximates the varying charge profile obtained using tapered edge termination but with easier manufacturing and lower cost.

Multi-layer hybrid edge termination for III-N power devices

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Drexel Hill, PA, United States of America

Michael Robert Hontz