Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Infineon Technologies Ag (1 from 14,743 patents)
1 patent:
1. 9543157 - Method for processing a carrier, a method for operating a plasma processing chamber, and a method for processing a semiconductor wafer