International Business Machines Corporation

Michael Renner

Lawrence G Cook

Norman B Clarke

Robert G Doyle

Chad Rue

Steven B Herschbein

Herschel M Marchman

Narender N Rana

An optical-fiber based light channel system is included in an ion/electron beam tool for imaging and/or processing integrated circuits. The optical channel system includes an image collection portion, an optical fiber image transmission portion and a detector portion. The image collection portion includes micro-optical components and has submillimeter dimensions, so that it is easily accommodated within the working distance of the ion/electron beam tool. The entire system is sufficiently compact and lightweight so that it may easily be mounted on a translation stage inside the sample chamber, which permits the optical channel to be mechanically extended and retracted to avoid blocking the primary ion or electron beam. The system may be mounted to a translation stage or to a gas injector assembly, which may itself be mounted to a flange plate on the chamber wall with feed-through ports for electrical and optical signals.

High-resolution optical channel for non-destructive navigation and processing of integrated circuits

A probe 100 which can be formed from a molded plastic provides an inexpensive construction for a probe which may be readily replaced in electrical testing apparatus, particularly of the automated type. A conductive contact tip 18 is preferably co-molded into a cantilevered portion 14' of a body block 14 and a conductive material 16 is provided over a portion of the surface of the body block 14 extending from the contact tip 18 to an attachment portion 15 of the body block. Cooperating attachment structures 22, 24 are provided on both the body block 14 and a holder block 20 to provide a snap fit therebetween. The holder block 20 can be provided with a resilient tab 29 opposing the attachment portion of the body block for engagement with a connector lug 12 of the testing apparatus, sandwiching the connector lug 12 between the attachment portion 15 of the body block 14 and the holder block 20. Flanges of the holder block 20 provide lateral support for the cantilevered portion 14' of the body block. Contact tip 18 is located on cantilevered portion 14' with high precision through the use of a preload block 140 which is separated from the body block 14 or probe tip sub-assembly 210 after molding.

Method of making conductive molded tip head assembly

Molded test probe assembly

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Highland, NY, United States of America

Michael Renner