International Business Machines Corporation

Globalfoundries Inc.

Michael Raymond Lunn

Charles A Choate

Mousa H Ishaq

Donald A Martin

Timothy S Hayes

Michael C Triplett

Robert E Desrosiers

Paul R Nisson

Charles Augustus Choate, Iv

Robert L Jourdain

Dean W Siegel

A method and apparatus for controlled access to pressurized fluid lines and to exhausted lines. The apparatus includes a rod body having a bore; a packing fitting attached to a first end of the rod body and a ball valve attached to a second end of the rod body; a transverse arm between the first and second ends of the rod body, the transverse arm having a bore communicating the rod body bore; and a slideable rod in the bore of the rod body, in a first position of the rod a first end extends through the packing fitting to outside of the rod body and a second end is completely within the rod body, in a second position of the rod the first end extends through the packing fitting to outside of the rod body and the second end of the rod extends through and past the ball valve.

Apparatus and method for controlled access to pressurized fluid lines and to exhausted lines

The present invention describes a method of forming a thin film on a substrate arranged in a deposition system comprising the step of introducing a pre-determined amount of an impurity in a confined volume in the deposition system. One or more gases are introduced into the deposition system for forming the thin film. The impurity is removed from the confined volume in a gas phase during formation of the thin film. The impurity in the gas phase is incorporated into the thin film.

Incorporation of an impurity into a thin film

An oxidation exhaust trap for filtering a particulate product of a first gas contacted with a gaseous oxidizing agent. The oxidation exhaust trap has a vessel having an interior cavity. The vessel further having a first inlet in communication with the interior cavity for introduction of the first gas into the interior cavity and a second inlet in communication with the interior cavity for introduction of the gaseous oxidizing agent into the interior cavity, the gaseous oxidizing agent mixing with the first gas thereby causing oxidation of the first gas for producing the particulate product suspended in a gaseous product. Lastly, the vessel has an outlet in communication with the interior cavity. A filter is disposed in the interior cavity for filtering the particulate product from the gaseous product which is exhausted through the outlet. In a preferred embodiment of the present invention, the first gas is silane and the gaseous oxidizing agent is air. Other aspects of the present invention are methods for filtering a particulate product of a first gas contacted with a gaseous oxidizing agent and a system for the same.

Silane oxidation exhaust trap

Growing community of inventors

Georgia, VT, United States of America

Michael Raymond Lunn