Corning Incorporated

Michael R Heslin

Jason S Watts

John M Dafin

Paul A Williams

David L Ashley

Nicholas Francis Borrelli

Charlene Marie Smith

Stephan Lvovich Logunov

Paul Stephen Danielson

Paul Maynard Schermerhorn

Johannes Moll

The invention provides an ultraviolet lithography method/system. The lithography method and system include providing a below 200 nm radiation source, providing a photolytically improved transmitting fused silica glass lithography optical element, transmitting below 200 nm photons through said photolytically improved transmitting fused silica glass lithography optical element to form a lithography pattern which is reduced and projected onto a radiation sensitive lithography printing medium to form a printed lithography pattern. Providing the photolytically improved transmitting fused silica glass lithography optical element includes providing a photolytically improved transmitting fused silica glass lithography optical element preform body and forming the photolytically improved transmitting fused silica glass lithography optical element preform into said lithography optical element.

Method of inducing transmission in optical lithography preforms

A runway for conveying glass tubing, as the tubing is drawn from a source of molten glass, embodies support assemblies having rotating sleeves mounted on guide shafts to contact the tubing. A circulating humid atmosphere is maintained in an enclosure during an initial portion of the tube draw to reduce frictive damage to the tubing.

Support assembly for conveying glass tubing

A runway for conveying glass tubing, as the tubing is drawn from a source of molten glass, embodies support assemblies having rotating sleeves mounted on guide shafts to contact the tubing. A circulating humid atmosphere is maintained in an enclosure during an initial potion of the tube draw to reduce frictive damage to the tubing.

Conveying glass tubing

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Elmira, NY, United States of America

Michael R Heslin