Honeywell International Inc.

Amazon Technologies, Inc.

Michael R Foster

Derek Solomon Pai

John David Dunagan

Mark Eskridge

John Walter Heitmann

Shifang Zhou

Caitlyn Rose Shim

David John Ward, Jr

Mark S Williams

Christopher Brian Barclay

Ijaz H Jafri

Gautam Shanbhag

A resource manager may monitor resources offered by a resource provider. The resource manager receives computing metrics from the resources and may perform a management action when a customer defined usage limit is satisfied. The management action may include the resource manager generating an alert, or the resource manager preventing the customer from further accessing the resources offered by the resource provider. The resource manager may also be used to reduce the cost of running a customer's application that uses resources offered by the service provider. The resource manager may also receive business metrics from the customer and determine rates of return using the business metrics and the computing metrics.

Resource manager

Monitoring data can be sent, received, stored, and accessed with zero setup. Customers can send monitoring data to be stored without the customers having to perform any setup ahead-of-time, such as arbitrary lists of key-value pairs. Customers can perform zero setup pivot queries using stored monitoring data. For example, users can perform pivot queries using any available stored information, such as available metric types and dimensions, without any setup needed ahead-of-time.

Flexible pivot querying of monitoring data with zero setup

Monitoring data can be received and managed in a multi-tenant environment. Monitoring data can be received for multiple tenants. The received monitoring data can be sorted. Sorting can be performed based on various criteria, such as by tenant. The sorted monitoring data can be written to data files. Each data file can store monitoring data for a plurality of tenants. Receiving, sorting, and writing monitoring data can be performed within a multi-tenant monitoring system.

Multitenant monitoring system storing monitoring data supporting flexible pivot querying

Pivot queries can be performed using stored monitoring data. Pivot queries can be received. Monitoring data can be read from data files. Each data file can store monitoring data for a plurality of tenants. The read monitoring data can be aggregated based on metric types across various dimensions, according to the pivot queries. Results can be presented in various formats, such as charts and graphs. Reading, aggregating, and presenting results can be performed within a multi-tenant monitoring system.

Performing flexible pivot querying of monitoring data using a multi-tenant monitoring system

Sensor packages and methods for making a sensor device package for side mounting on a circuit board. A sensor device(s) in a mechanical layer of silicon is sandwiched between first and second layers of glass to create a wafer. A first via(s) is created in the first or second layers to expose a predefined area of the mechanical layer of silicon. A second via(s) is created in the first or second layers. The least one second via has a depth dimension that is less than a depth dimension of the first via. A metallic trace is applied between the exposed area on the mechanical layer and a portion of the second via. The wafer is sliced such that the second via is separated into two sections, thereby creating a sensor die. The sensor die is then electrically and mechanically bonded to a circuit board at the sliced second via.

Edge-mounted sensor

An out-of-plane comb-drive accelerometer. An example accelerometer linearizes a response. An example accelerometer includes one or more stators having a plurality of tines having a surface parallel to a surface of substrate. The tine surface is at a first distance from the surface of the substrate. A proof mass includes one or more rotors that include a plurality of rotor tines attached to an edge of the proof mass. The rotor tines are interleaved with corresponding ones of the stator tines. The rotor tines include a surface parallel to a surface of the substrate. The rotor tine surface is at a second distance from the surface of the substrate. The first distance and second distance are unequal by a threshold amount. Motion of the rotor relative to the stator in an out-of-plane direction provides a linear change in a capacitive value measured across the rotor and the stator.

Out-of plane comb-drive accelerometer

A bi-directional, out-of-plane electrostatic comb drive apparatus including two electrically independent sets of stator comb tines; and a method for fabricating an out-of-plane comb drive with stacked sets of stator comb tines. A first set of stator comb tines is offset from a second set of stator comb tines. A set of rotor comb tines interleaves with both sets of stator comb tines. A first voltage applied to the first set of stator comb tines operates to pull the rotor tines toward the first set of stator comb tines. A second voltage applied to the second set of stator comb tines operates to pull the rotor tines toward the second set of stator comb tines, enabling bi-directional operation. A fabrication method is disclosed that enables fabrication of the first and second sets of stator comb tines that are mechanically and electrically independent and interleaved by the rotor comb tines.

Bidirectional, out-of-plane, comb drive accelerometer

System and methods offset mechanism elements during fabrication of Micro-Electro-Mechanical Systems (MEMS) devices. An exemplary embodiment applies a voltage across an offset mechanism element and a bonding layer of a MEMS device to generate an electrostatic charge between the offset mechanism element and the bonding layer, wherein the electrostatic charge draws the offset mechanism element to the bonding layer. The offset mechanism element and the bonding layer are then bonded.

Systems and methods for fabricating an out-of-plane MEMS structure

Methods of anchoring components of a Micro-Electro-Mechanical Systems (MEMS) device to a substrate. An exemplary embodiment has a trace anchor bonded to a substrate, a device anchor bonded to the substrate, and an anchor flexure configured to flexibly couple the trace anchor and the device anchor to substantially prevent transmission of a stress induced in the trace anchor from being transmitted to the device anchor.

Methods for reduced stress anchors

Alternative methods of constructing a vertically offset structure are disclosed. An embodiment includes forming a flexible layer having first and second end portions, an intermediate portion coupling the first and second portions, and upper and lower surfaces. The distance between the upper and lower surfaces at the intermediate portion is less than the distance between the upper and lower surfaces at the first and second end portions. The first end portion is bonded to a base member. The second end portion of the flexible layer is deflected until the second end portion contacts the base member. The second end portion is bonded to the base member.

Mitigation of high stress areas in vertically offset structures

Anchor systems and methods anchor components of a Micro-Electro-Mechanical Systems (MEMS) device to a substrate. An exemplary embodiment has a trace anchor bonded to a substrate, a device anchor bonded to the substrate, and an anchor flexure configured flexibly couple the trace anchor and the device anchor to substantially prevent transmission of a stress induced in the trace anchor from being transmitted to the device anchor.

Systems and methods for reduced stress anchors

A device according to the present invention includes a MEMS device supported on a first side of a die. A first side of an isolator is attached to the first side of the die. A package is attached to the first side of the isolator, with at least one electrically conductive attachment device attaching the die to the isolator and attaching the isolator to the package. The isolator may include isolation structures and a receptacle.

Growing community of inventors

Issaquah, WA, United States of America

Michael R Foster