International Business Machines Corporation

Michael R Amsden

Cuc Kim Huynh

Douglas P Nadeau

Paul A Manfredi

Richard A Bartley

Disc shaped cleaning/polishing pads are disclosed for use on a cleaning/polishing apparatus wherein the surface of the cleaning/polishing pad comprises resilient members arranged in patterns which will facilitate the movement of fluids (deoinized water, chemical slurry, etc.) from the center region of the pad to the periphery of the pad. Arrangement of the resilient members on the pads may be spiral, swirl, concentric or any other suitable pattern which will direct fluids to the periphery of the pad upon rotation of the pad.

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Londonderry, VT, United States of America

Michael R Amsden