Solvay Fluor Und Derivate Gmbh

Other

Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Solvay (societe Anonyme)

Solvay Sa

Solvay Fluor Gmbh

Michael Pittroff

Heinz-Joachim Belt

Thomas Schwarze

Matthias Rieland

Robert Wieland

Karl-Heinz Gregor

Jamila Boudaden

Reiner Distel

Ludwich Bettens

Pierre Barth&eacute;lemy

Hans-Peter Wickel

Anja Pischtiak

The present invention relates to a process for cleaning chambers of apparatus used for semiconductor manufacturing with a gas mixture comprising or consisting of fluorine, nitrogen and argon as well as said gas mixtures.

Process for etching, and chamber cleaning and a gas therefor

Gas mixtures of SF and N which have been used as an insulating filler gas for underground cables can be separated by use of a membrane separation in order to recover the SF .

Isolation of SF6 from insulating gases in gas-insulated lines

A method for the recovery or separation of sulfur oxyfluorides from gas mixtures, in which the gas mixture passes through at least one adsorption stage or membrane stage containing or consisting of zeolites with a modulus >10. The sulfur oxyfluorides fixed to the adsorbent may be made available for use after desorption. The sulfur oxyfluorides enriched through the membrane can be re-used directly.

Method for recovering and/or separating sulfur oxyfluorides from gas mixtures

Gas mixtures of SF and N , which have been used, for example, as an insulating filler gas for underground cables, for insulating-gas window panes or as a filler gas for car tires and SF /air mixtures which have been used as a protective gas when casting magnesium can be separated if they are contacted with hydrophobic zeolites of a certain pore size as selective adsorption agent for sulfur hexafluoride. For a relatively high SF concentration, the mixture is preferably first subjected to a membrane separation process and the permeate is contacted with the adsorption agent. The invention also relates to an apparatus for carrying out the process. The process may also be used for separating SF from exhaust gases.

Separation of gases containing SF6

Preparation of homogeneous gas mixtures with SF.sub.6

Process for the decoloration and the toxification of highly polluted (COD.gtoreq.1000 mg/l) resistant aqueous effluents by an oxidation treatment of the effluents by hydrogen peroxide, continuously and in a homogeneous phase, at a pH of 2 to 5 in the presence of Fe ions and under irradiation by means of UV radiation. The AvOx/COD ratio by weight is not less than 0.5:1 and the AvOx/concentration of Fe ions ratio by weight is not less than 50:1.

Process for the decoloration and detoxification of aqueous effluents

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Hannover, Germany

Michael Pittroff