Endress + Hauser Gmbh + Co. Kg

Endress+hauserse+co. Kg

Michael Philipps

Anh Tuan Tham

Andreas Rossberg

Ulfert Drewes

Wolfgang Dannhauer

Dieter Stolze

Frank Hegner

Elke Maria Schmidt

Jörg Müller

Rafael Teipen

Matthias Altendorf

Andrea Berlinger

Andreas Mayr

Timo Kober

Roland Werthschützky

Friedrich Schwabe

Andreas Roßberg

Jorg Muller

Marco Doms

The pressure sensor of the invention includes at least one platform, at least one measuring membrane, and a transducer, wherein the measuring membrane comprises a semiconductor material, wherein the measuring membrane, enclosing a pressure chamber, is secured on the platform, wherein the measuring membrane is contactable with at least one pressure and is elastically deformable in a pressure-dependent manner, wherein the transducer provides an electrical signal dependent on deformation of the measuring membrane, wherein the platform has a membrane bed, on which the measuring membrane lies in the case of overload, in order to support the measuring membrane, wherein the membrane bedhas a glass layer, whose surface faces the measuring membrane and forms a wall of the pressure chamber, wherein the surface of the glass layer has a contour, which is suitable for supporting the measuring membranein the case of overload, characterized in that the contour of the membrane bedis obtainable by a sagging of an unsupported region of a glass plate at increased temperature, due to the force of gravity on the unsupported region of the glass plate, and subsequent cooling of the glass plate.

Pressure sensor, especially pressure difference sensor

A pressure sensor includes a sensor body with a sensor chamber in the interior, at least a first separating membrane, forming a first separating membrane chamber connected with the sensor body. A measuring membrane divides the sensor chamber into two chamber portions. A pressure transfer liquid, with which the first separating membrane chamber, the first chamber portion and a channel therebetween are filled, in order to transfer a pressure to the measuring membrane; wherein the pressure sensor is specified for a temperature range between a minimum temperature and a maximum temperature, as well as for a pressure range. At the minimum temperature, the pressure transfer liquid volume in the first chamber portion, the first channel and the first separating membrane chamber is sufficient over the total pressure range to transfer the pressure to the measuring membrane, without the first separating membrane coming to rest, and that when, in the case of overload at maximum temperature, the entire pressure transfer liquid volume moves out of the first separating membrane chamber into the first chamber portion, and is accommodated by the measuring membrane, the measuring membrane experiences no plastic deformation.

Overload safe pressure sensor, especially pressure difference sensor

A pressure measuring cell includes at least one ceramic measuring membrane body; and at least one ceramic platform, wherein the measuring membrane body is connected with the platform along an annular, peripheral joint. The joint is formed as a welded connection between the measuring membrane body and the platform, wherein the measuring membrane body has a pressure-dependently deformable measuring membrane. A pressure sensor includes a pressure measuring cell and a housing, wherein the pressure measuring cell is held by the housing, and wherein the pressure measuring cell closes a housing opening, through which the pressure measuring cell communicates with an environment of the housing. A seal is clamped between a sealing surface surrounding the opening of the housing and a sealing surface of the pressure measuring cell.

Ceramic pressure measuring cell

A method for manufacturing a connection between two ceramic parts comprises: providing a first ceramic part and a second ceramic part; providing an active hard solder, or active braze, on at least one surface section of at least one of the ceramic parts; and heating the active hard solder, or active braze, in a vacuum soldering, brazing process. The entire active hard solder, or active braze, for connecting the first and second ceramic parts is provided in such a manner that at least one surface section of at least one of the ceramic parts, preferably both ceramic parts, is coated by means of gas phase deposition of the alloy of the active hard solder, or active braze.

Method for manufacturing a connection between two ceramic parts, especially parts of a pressure sensor, and a ceramic product, especially a ceramic pressure sensor

A pressure sensor, comprising: a monocrystalline membrane body, which includes a measuring membrane and an edge region surrounding the measuring membrane. The edge region has a greater material thickness than the measuring membrane and the edge region has a first mounting surface, whose surface normal is given by a first principal crystal axis. A monocrystalline substrate, which, with respect to crystal structure, comprises the same semiconductor material as the membrane body, the substrate has a second mounting surface, whose surface normal extends parallel to the first principal crystal axis. The membrane body is tightly connected to the substrate by joining the first mounting surface to the second mounting surface. The orientations of other principal crystal axes of the membrane body and the substrate are, in each case, oriented parallel relative to one another.

Pressure sensor

A method for manufacturing measuring transducers, especially pressure or pressure difference measuring transducers, in which a high degree of quality, safety and accuracy of measurement is achievable with little logistical and manufacturing effort. The measuring transducer has a memory readable and writable via an associated RFID interface, and at least one sensor for registering a physical, measured variable and for transducing such into an electrical variable, wherein the sensor is equipped with sensor electronics, which serves to condition the electrical variable into an electrical measurement signal dependent on the measured variable, and which is equipped with an RFID transponder, via which the sensor is supplied with energy, and via which measurement signals can be read out wirelessly. The measuring transducers and/or their sensors are subjected to at least one calibration and/or test procedure, in which the sensors are exclusively supplied with energy via their RFID transponders, and their measurement signals are read out via their RFID transponders, and measuring transducer specific and/or sensor specific data derived during the calibration and/or test procedure are stored in the memory via the RFID interface.

Method for manufacturing measuring transducers

A flow measuring arrangement for measuring flow through a measuring tube comprises at least one constriction located in the measuring tube, which effects a reduction of a volume through which a medium flows; at least one deflectable membrane applied to said constriction, wherein deflection of the membrane effects a change of a volume through which medium flows in the measuring tube; a pressure measuring system connected to the measuring tube for measuring pressure (&#x394;p, p); measuring electronics, which determines flow based on the measured pressure (&#x394;p, p); an apparatus for producing a time variable deflection of the membrane and a diagnostic system, which determines an affect of said deflections of the membrane on the measured pressure (&#x394;p, p), and which diagnoses the flow measuring arrangement based on the deflections and determined effects thereof on the measured pressure (&#x394;p, p).

Flow measuring apparatus including a deflectable membrane applied to a constriction

A pressure difference measuring cell for registering pressure difference between a first pressure and a second pressure, comprises: an elastic measuring arrangement having at least one measuring membrane, or diaphragm, that comprises silicon; a platform, which is pressure-tightly connected with the elastic measuring arrangement; a first hydraulic path for transferring a first pressure onto a first surface section of the elastic measuring arrangement; and a second hydraulic path for transferring a second pressure onto a second surface section of the elastic measuring arrangement. The first pressure opposes the second pressure, and the elastic deflection of the measuring arrangement is a measure for the difference between the first and the second pressure, wherein the pressure difference measuring cell has additionally at least one hydraulic throttle, characterized in that the at least one hydraulic throttle comprises porous silicon.

Pressure difference measuring cell

An apparatus having at least one sensor for registering at least one chemical and/or physical, process variable, and at least one modularly constructed, measuring transducer circuit, which has at least one sensor unit, which ascertains a measured variable from the process variable registered by the sensor and supplies the sensor with energy as needed, and at least one application specific, signal processing unit for ascertaining a measured value of the measured variable, wherein a conditioned output signal is provided between the sensor unit and the application specific, signal processing unit, wherein the application specific, signal processing unit is exchangeably embodied, and wherein, as a function of a predeterminable accuracy of measurement with which the apparatus ascertains the measured values, a plurality of different types of application specific, signal processing units are provided.

Apparatus having a modularly constructed, measuring transducer circuit

A pressure sensor includes a hydraulic path filled with a pressure transfer liquid and a pressure transducer having a pressure sensitive deformation body. The hydraulic path includes a channel which extends from a pressure input opening at least to the deformation body, wherein the pressure input opening is spaced a separation distance from the deformation body, and wherein pressure on the deformation body deviates from pressure at the pressure input opening by the difference of the hydrostatic pressure of the pressure transfer liquid between the pressure input opening and the deformation body. The pressure sensor further includes an inclination sensor for determining at least one inclination value dependent on the inclination of the hydraulic path, and a processing circuit, which is suitable to determine the difference of the hydrostatic pressure of the pressure transfer liquid between the pressure input opening and the deformation body as a function of inclination value, a density value of the pressure transfer liquid and a separation distance.

Pressure sensor and pressure difference sensor

A pressure measuring device for measuring and/or monitoring the pressure of a measured medium. The pressure measuring device includes a sensor housing and a measurement transmitter, wherein assigned to the sensor housing is a pressure measuring cell with a pressure sensitive measuring element. Assigned to the pressure measuring cell is a temperature sensor, and assigned to the measurement transmitter is a control/evaluation unit. In order to increase the measurement accuracy of the pressure measuring device, it is provided, that the control/evaluation unit, in the case of an abrupt change of the temperature registered by the temperature sensor, ascertains, or provides, a step response, wherein the step response has a sensor-type-specific, settling time, and the control/evaluation unit, on the basis of the ascertained, or provided, step response, references the corresponding time-dependent integral temperature of the pressure measuring cell, in order to eliminate, or to compensate, the temperature influence on the pressure measurement signal provided by the measuring element.

Growing community of inventors

Lorrach, Germany

Michael Philipps