Kla Tencor Corporation

Nanomechanics, Inc.

Michael P Drake

Warren C Oliver

Sudharshan Phani Pardhasaradhi

John Swindeman

Warren Oliver

A mechanical testing system having a frame, and a stage for holding a sample. An arm for pressing a tool against a surface of the sample. A primary actuator is connected to the frame and applies a primary force and drives the tool relative to the sample, thereby causing the frame to flex. A displacement sensor measures a displacement value comprised of two components, the first component including a distance traveled by the probe into the sample as the primary force is applied, and the second component including a measure of a degree of flex of the frame as the primary force is applied. A compensating actuator is connected to the frame and applies a compensating force that reduces the second component of the displacement value.

Compensated mechanical testing system

The application describes an electromechanical actuator for generating a mechanical force to be transferred to an apparatus. The electromechanical actuator comprises an electromagnetic coil, a connecting member, and a magnet. The connecting member is mechanically coupled between the electromagnetic coil and the apparatus and is configured to transfer the mechanical force from the electromagnetic coil to the apparatus. The magnet is disposed between the electromagnetic coil and the apparatus and includes a channel in which the electromagnetic coil is disposed, the channel having a channel opening that faces away from the apparatus, the magnet further having a central hole through which the connecting member extends.

Growing community of inventors

Knoxville, TN, United States of America

Michael P Drake