Cymer, Inc.

Seriate Solutions, Inc.

Michael P C Watts

Tom A Watson

An electric discharge laser with an associated programmable controller which (1) will permit an operator to specify beam quality parameters based on historical data (2) will monitor those parameters and (3) will provide a notification signal to the operator informing him when the beam quality is adequate for integrated circuit fabrication. The controller is programmed to indicate an out-of-control condition when one or more quality parameters exhibit certain specified non-random behavior such as two out of three quality measurements deviating by more than 4 standard deviations and/or three out of four quality measurements deviating by more three standard deviations. In a preferred embodiment the program is designed to detect poor quality by looking for these &ldquo;runs&rdquo; of bad quantity data and to produce false indication of system out of control, on the average, no more than once each two months.

Laser lithography quality alarm system

A stereo graphic user interface (GUI) includes stereo pairs of conventional GUI interface objects, such as a cursor, menu bars, buttons, and so on. In one implementation, a slave component is located on the same display screen as, and at a fixed displacement from, a master component. Any changes to the master component are tracked and made to the slave component so as to form and maintain stereo pairs of components. The stereo GUI may be configured to support multiple viewers, and a user may employ the stereo GUI not only to view stereo pairs of graphical objects but also to manipulate them.

Growing community of inventors

Portola Valley, CA, United States of America

Michael P C Watts