4d Technology Corporation

Agilent Technologies, Inc.

Michael North-Morris

James E Millerd

Anthony S Lee

An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.

Synchronous frequency-shift mechanism in fizeau interferometer

Synchronous frequency-shift mechanism in Fizeau interferometer

A tracking stage has an optical filter with a free spectral range greater than the maximum mode hop of a tunable laser. The free spectral range is sufficient to determine the wavelength of the laser output after the mode hop. The output is dithered or a quadrature signal is used to determine whether the mode hop is forwards or backwards. In a further embodiment, a second tracking stage with a shorter free spectral range is coupled to the tunable laser to provide enhanced wavelength resolution. Alternatively, the second tracking stage is omitted and the signal of the tracking stage is amplified to enhance wavelength resolution.

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Tucson, AZ, United States of America

Michael North-Morris