Edwards Limited

Michael Mooney

Michael Roger Czerniak

Laurent Marc Philippe

Nigel James Gibbins

Vincent Giorgi

A monitoring apparatus may include reception logic operable to receive processing characteristic data generated during the processing of the effluent stream; segregation logic operable to segregate the processing characteristic data into contributing processing characteristic data associated with contributing periods which contribute to a condition of the at least one processing tool and non-contributing processing characteristic data associated with non-contributing periods which fail to contribute to the condition; and fault logic operable to utilise the contributing processing characteristic data and to exclude the non-contributing processing characteristic data when determining a status of the condition.

Processing tool monitoring

The present invention relates to a vacuum pumping system () which comprises: a vacuum pumping mechanism () and a motor () for driving the vacuum pumping mechanism. Means () are provided for determining a cumulative load on the vacuum pumping system over time by monitoring a characteristic of the motor over that time. Means () are also provided for activating a maintenance activity on the system when the cumulative load exceeds a predetermined amount.

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Brighton, United Kingdom

Michael Mooney