Asml Netherlands B.v.

Michael Marinus Anna Steur

Hans Butler

Nicolaas Ten Kate

Johannes Petrus Martinus Bernardus Vermeulen

Antonius Franciscus Johannes De Groot

Siegfried Alexander Tromp

Johannes Adrianus Cornelis Maria Pijnenburg

Koen Gerhardus Winkels

Bas Jansen

Sander Jeroen Hermanussen

An object table including: a holding surface for holding an object; and an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface, wherein the actuator arrangement is further configured to decrease a strain in the object caused by the holding force by sequentially detaching and re-attaching portions of the object from the holding surface, while the object is held to the holding surface.

Object table, stage apparatus, holding method and lithographic apparatus

Substrate tables and methods of manufacturing substrate supports for substrate tables. In one arrangement, a plurality of holes are formed through a base member. A burl formation member is joined to the base member. A plurality of burl structures are formed in the burl formation member. Each burl structure includes a distal surface that contacts, in use, a substrate being supported. Each burl structure has an opening to at least one of the holes formed through the base member.

Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of use

An object table configured to hold an object on a holding surface, the object table including: a main body; a plurality of burls extending from the main body, end surfaces of the burls defining the holding surface; an actuator assembly; and a further actuator assembly, wherein the actuator assembly is configured to deform the main body to generate a long stroke out-of-plane deformation of the holding surface based on shape information of the object that is to be held and the further actuator assembly is configured to generate a short stroke out-of-plane deformation of the holding surface.

Object table, a stage apparatus and a lithographic apparatus

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Eindhoven, Netherlands

Michael Marinus Anna Steur