Infineon Technologies Ag

International Business Machines Corporation

Other

Qimonda Ag

Michael Maldei

Guenter Gerstmeier

Steven Michael Baker

Jon Stanley Berry, Ii

Brian Cousineau

Johnathan E Faltermeier

Jinhwan Lee

David M Dobuzinsky

Rama Divakaruni

Chienfan Yu

Malati Hedge

Yun Yu Wang

Ravikumar Ramachandran

Viraj Yashawant Sardesai

Larry Alan Nesbit

Jay William Strane

Rajesh Rengarajan

Jeremy K Stephens

Munir D Naeem

Philip L Flaitz

Larry Clevenger

Munir-ud-Din Naeem

Prakash Chimanlal Dev

Thomas Rupp

John Preston Benedict

Michael M Iwatake

Colleen M Snavely

Petra Stumm

Malati Hegde

Jinwhan Lee

Wenchao Zheng

Lisa Y Ninomiya

Embodiments of the invention are related to methods, systems, and articles of manufacture for transferring data between two devices using an interconnect bus. On each conductive line of the bus, a bit representing a first logic state is transferred if a current bit is the same as an immediately previously transmitted bit. If the current bit is different from the immediately previously transmitted bit, then a bit representing a second logic state is transferred.

Derivative logical output

A dynamic random access memory (DRAM) structure having a distance less than 0.14 um between the contacts to silicon and the gate conductor is disclosed. In addition a method for forming the structure is disclosed, which includes forming the DRAM array contacts and the contacts to silicon simultaneously.

High density DRAM with reduced peripheral device area and method of manufacture

A process for fabricating a semiconductor structure, wherein the semiconductor structure includes a core region and a periphery region. The core region includes a plurality of transistors and the periphery region includes a plurality of transistors. The process includes depositing a middle-of-line liner using plasma enhanced chemical vapor deposition overlying the semiconductor structure. By using a plasma enhanced chemical vapor deposition the amount of MOL liner deposited in the core region and the periphery region can be controlled depending on the distances between transistors in the core region and periphery region.

Maskless middle-of-line liner deposition

An etch rate of a nitride liner layer is improved relative to an etch rate of a nitride cap layer. The nitride liner layer is located at an exposed portion of a substrate adjacent to a stacked structure also located atop the substrate. The nitride cap layer is located atop the stacked structure. An oxide spacer is formed along sidewalls of the stacked structure. The nitride liner layer is patterned and etched to form at least one opening therein to the substrate while the nitride cap layer remains substantially intact.

Method of reducing erosion of a nitride gate cap layer during reactive ion etch of nitride liner layer for bit line contact of DRAM device

A dynamic random access memory (DRAM) structure having a distance less than 0.14 &#x3bc;m between the contacts to silicon and the gate conductor is disclosed. In addition a method for forming the structure is disclosed, which includes forming the DRAM array contacts and the contacts to silicon simultaneously.

A method of forming borderless contacts and a borderless contact structure for semiconductor devices. A preferred embodiment comprises using a second etch selectivity material disposed over a first etch selectivity material to preserve the first etch selectivity material during the etch processes for the various material layers of the semiconductor device while forming the borderless contacts.

Reduced cap layer erosion for borderless contacts

A method of forming bitlines for a memory cell array of an integrated circuit and conductive lines interconnecting transistors of an external region outside of the memory cell array is provided. The method includes patterning troughs in a dielectric region covering the memory cell array according to a first critical dimension mask. Bitline contacts to a substrate and bitlines are formed in the troughs. Thereafter, conductive lines are formed which consist essentially of at least one material selected from the group consisting of metals and conductive compounds of metals in horizontally oriented patterns patterned by a second critical dimension mask, wherein the conductive lines interconnect the bitlines to transistors of external circuitry outside of the memory cell array, the conductive lines being interconnected to the bitlines only at peripheral edges of the memory cell array.

Self-aligned array contact for memory cells

A capacitor for a semiconductor device and a method of manufacturing a capacitor for a semiconductor device is disclosed that uses radial current flow. The capacitor includes a semiconductor substrate that includes a plurality of insulation islands. An insulation layer is formed over the semiconductor substrate. Gate electrodes are formed on top of the insulation layer. An array of CD contact pads including a plurality of CD contacts are connected to the semiconductor substrate in a first predetermined number of locations. An array of CG contact pads including at least one CG contact connected to the gate electrodes such that each CG contact is connected to a respective gate electrode above a respective insulation island in a second predetermined number of locations.

Microelectronic capacitor structure with radial current flow

In a method of forming a contact, a liner reactive ion etch is affected on a substrate to remove silicon nitride and silicon oxide. An oxygen plasma ex-situ clean, a Huang AB clean, and a dilute hydrofluric acid (DHF) clean are affected. Amorphous silicon is deposited and an anneal is performed to regrow and recrystallize amorphous silicon.

Method to enhance epitaxial regrowth in amorphous silicon contacts

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Durham, NC, United States of America

Michael Maldei