The University of Texas System

Lb USA Flexibles, Inc.

David S. Smith America, Inc., Dba, Worldwide Dispensers

Michael Maher

Christopher John Ellison

Christopher M Bates

C Grant Willson

Loren L Brelje

Carlton Grant Willson

James L Richards

Dustin Janes

Julia Cushen

Logan J Santos

Leon Dean

Erica L Rausch

Takehiro Seshimo

Yusuke Asano

Gregory Blachut

The present invention relates to a method for the synthesis and utilization of block copolymer can that form sub-10 nm lamella nanostructures. Such methods have many uses including multiple applications in the semiconductor industry including production of templates for nanoimprint lithography.

Block polymers for sub-10 nm patterning

A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second preference mode, wherein the selected regions define other regions of the first layer retaining the first preference mode thereby forming an alignment layer for block copolymers.

Ordering block copolymers

The use of self-assembled block copolymer structures to produce advanced lithographic patterns relies on control of the orientation of these structures in thin films. In particular, orientation of cylinders and lamellae perpendicular to the plane of the block copolymer film is required for most applications. The preferred method to achieve orientation is by heating. The present invention involves the use of polarity-switching top coats to control block copolymer thin film orientation by heating. The top coats can be spin coated onto block copolymer thin films from polar casting solvents and they change composition upon thermal annealing to become 'neutral'. Top coats allow for the facile orientation control of block copolymers which would otherwise not be possible by heating alone.

Anhydride copolymer top coats for orientation control of thin film block copolymers

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Austin, TX, United States of America

Michael Maher