Guzik Technical Enterprises

Kmy Instruments

Michael Mager

Boris Slutsky

A micropositioner has a coarse positioner and a fine positioner, with a separate closed loop control circuit for the fine positioner. A disk head being positioned over a disk is attached to the stage of the fine positioner. The fine positioner includes a parallelogram flexure having first and second opposite sides attached respectively to the coarse positioning stage and the fine positioning stage. A piezoelectric translator translates the second side of the flexure relative to the coarse positioning stage. In order to sense displacement of the fine positioning stage relative to the coarse positioning stage, a differential electric field sensor is employed. The sensor includes a pair of side plates both mounted fixedly relative to one of the stages and opposing each other to create an electrical field between them, and a probe plate mounted fixedly relative to the other of the two stages and between the two side plates. As the second stage moves relative to the first, the voltage sensed by the probe plate is fed back to control the piezoelectric translator until the probe voltage indicates that the fine displacement amount matches a desired fine displacement amount indicated by a command signal. In an embodiment, the fine positioner feedback loop controls the voltages applied to the side plates such that the voltage sensed by the probe plate is zero whenever the fine positioner is at equilibrium.

Micropositioning device for disk head testing system

An apparatus employs the phenomenon of frustrated total internal reflection for measuring nanometric distances. It includes a two-piece glass reference disk (200) consisting of an inner disk (202) and a coupling lens (212). The inner disk (202) contains a convex spherical surface (204) and a flat bottom surface (206). The coupling lens has a planar top surface (214) and a concave spherical surface (216). It is fixed over the inner disk which is rotated by a spindle (208). Aligned prisms (218 and 220) have polished planes (222 and 224) and polished surfaces (230 and 232). These surfaces provide optical contact of the prisms with the planar top surface of the coupling lens. A magnetic head (238) is suspended over the flat bottom surface of the inner disk. Other configurations of the reference disk and optical prisms are possible. One of the variations of the optical system contains a colored-light source (248), aimed at the polished prism surface at essentially normal incidence, a beam expander ( 250), placed between the light source and the polished prism surface, and a TV camera (252), which is positioned opposite the polished prism surface (222). As the spindle rotates the inner disk, the magnetic head floats on an air cushion created by the surface of the glass disk. A light beam (242), generated by the light-source, is converted into a wide parallel beam (244), which is directed at the surface of the magnetic head. A reflected beam (246) is received by the TV camera. The spacing between the magnetic head and the disk surface can be calculated from the drop in intensity of reflected light.

Apparatus for measuring nanometric distances employing frustrated total

An apparatus for calibration of optical flying-height testers includes a calibrated micropositioner (100), having a base surface (102) which is permanently attached to a flat horizontal platform (106) and a top surface (104). A transducing head (108) is rigidly, but removably, mounted onto the top surface of the micropositioner. A convex bottom surface (114) of a transparent lens (112), supported on screws (116, 118, and 120), is positioned directly above the transducing head. The lens is preloaded against the tips of the screws by springs (124, 126, and 128). A prism (132) is centrally positioned onto a flat top surface (130) of the lens. The prism contains working planes (136 and 138) which serve as light-energy entrance and exit surfaces and a planar bottom surface (142) which maintains optical contact with the flat top surface of the lens.

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San Jose, CA, United States of America

Michael Mager