Robert Boschgmbh

Michael Lindner

Vincent Thominet

Friedrich Prinzhausen

Bernd Schmidtke

Pawel Drabarek

Juergen Hackenberg

Peter Rehbein

Jochen Straehle

Juergen Bauer

Jochen Strähle

Georg Ketteler

Alexander Redlich

Martin Zimmer

Claus Westphal

Ruediger Bohnsack

Marcus Rinke

An interferometric measuring device for recording geometric data for surfaces of at least one object, including a beam supply section including a modulation interferometer fed by a light source including temporarily coherent broadband radiation, a measuring interferometer system that is connected thereto and includes a plurality of probe units for emitting radiation of measuring beams onto the assigned surface locations and recording the radiation reflected by the surface locations, the radiation forming interference with radiation reflected by a related reference element system, and including a downstream receiving and evaluation device for determining geometric data on the basis of the interfering radiation. A reduced expenditure with respect to operation and configuration is achieved in that a uniform platform, which also includes the receiving and evaluation device and an interface configuration to which the various probe units are optionally connectable, is formed from the beam inlet section including the modulation interferometer, and the modulation interferometer and the receiving and evaluation device are configured such that the various probe units are operable from the same platform and the interfering radiation is evaluatable.

Interferometric measuring device for recording geometric data for surfaces

An interferometric measuring device, especially for measuring the shape of a surface of an object, includes a radiation source emits a short coherent electromagnetic radiation, a component, in particular a beam splitter, to form an object beam that is guided to the object via an object light path, and a reference beam guided to a reference plane via a reference light path, and a pickup element, by the use of which an electromagnetic radiation, that is reflected by the object and the reference plane and brought to interference, is able to be picked up. In this context, an adaptive optical element is provided, with the aid of which the imaging of the object on the pickup element and/or the wave front of the reference beam and/or the optical path length in the reference light path and/or in the object light path may be influenced.

Interferometric measuring device

An optical measuring system for detecting geometric data of surfaces of at least one object is described, comprising a beam delivery section, a probe system which is connected to the latter and has a plurality of probe outputs for output of a particular measuring beam to an assigned particular surface location and recording the light reflected back by the surface, and having a downstream analyzer unit for determining the geometric data on the basis of light reflected back by the surface locations. A very accurate and mechanically robust determination of surface geometric data, e.g., diameter and roundness of a bore, is achieved by designing the probe system having the probe outputs in such a manner that the relative position of the probe system having the probe outputs positioned in fixed relationship to one another is also determinable in relation to the object(s) at least with regard to several relevant degrees of freedom, in addition to and simultaneously with the determination of the geometric data of the surface(s).

Optical measuring system for detecting geometric data of surfaces

An interferometric measuring device for measuring the shape or profile of a surface of an object by depth scanning includes a radiation source emitting a short coherent beam, a beam splitter for forming an object beam guided by panorama optics to the object via an object light path and a reference beam guided to a reflecting reference element via a reference light path, and an image pick-up which receives the radiation reflected by the object and the reference element and brought into interference and transmits it to an evaluator for determining the surface shape. An accurate and rapid measurement of surfaces, e.g., in narrow cavities, may be accomplished relatively easily in that a reference surface oriented at an angle to the object surface is formed by the reference element, and the measuring device is configured so that the depth scanning for measuring shape is accomplished by laterally moving the object in relation to the object beam.

An interferometric measuring device for three-dimensional measurement of shapes on an object to be measured having: a beam splitter receiving via an input light path, and splitting into measuring and reference light paths, light from a light source; an image pick-up, to which light reflected from the object and from a reference and brought into interference can be supplied via an output light path for conversion into electrical signals; an evaluation unit for determining the surface shape from the signals; and an adaptation device adapting the light intensity or interfering light signals. For increased measuring precision, the measuring device is configured to measure planar regions of the surface which extend over at least the measuring device's lateral resolution and the adaptation device is configured for adjusting the intensity of the light and/or the signals by locally varying reflective properties of the surface with respect to the measuring optics.

A fuel supply system, having a housing, in which a pistonlike element is disposed longitudinally displaceably in a bore and is guided sealingly in the bore by a guide portion. On one end, the guide portion adjoins a first fuel-filled chamber, and on its other end it adjoins a second fuel-filled chamber. At least one recess extending at least approximately in the circumferential direction is embodied in the guide portion of the pistonlike element and extends over at least part of the circumference of the pistonlike element and, viewed in the longitudinal direction of the pistonlike element, has an asymmetrical cross section.

Fuel supply for internal combustion engines

An interferometric measuring device for measuring a surface or an interface of an object to be measured is provided. The effect of vibration on the measurement result is suppressed by providing a connecting unit by which at least one section of the measuring device assigned to the object to be measured is mechanically rigidly and detachably connectable directly to the object to be measured.

An optical measuring device includes a 3-D measuring set-up for measuring the shapes of test object surfaces in three dimensions, and projection optics including an objective optics, the test object being illuminated by a light source via an illuminating beam using an illuminating optics. A rapid, highly resolving measurement of surface shapes which are nearly radially symmetric is provided by configuring the objective optics as image-flattening optics for covering (measuring) and flattening a curved surface area or as panoramic optics for measuring a radially symmetric surface area that encircles 360&#xb0;.

Optical measuring device

The interferometric measuring device () for measuring the shape of a surface of an object (O) has a radiation source (LQ), a beam splitter (ST) producing an object beam (OS) guided along an object light path to the object (O) and a reference beam (RS) guided along a reference light path to a reflective reference plane (RSP), an image recorder (BA) that records interfering radiation reflected by the object (O) and the reference plane (RSP) and an associated evaluation device (E) to determine the surface shape. A favorable adaptability and operation are achieved by arrangement of a fixed lens system (SO) that produces a fixed intermediate image (SZB) in the object light path and a movable lens system (BO) that is movable in a direction of its optical axis for depth scanning. The image recorder (BA) has pixels arranged next to each other on an extended planar surface.

The present invention relates to an optical measuring device () for measuring the shape of particularly rough surfaces of a test object (O), the measuring device including a device that has at least one light source (LQ), one illumination optics, one measuring optics, and at least one detection unit, for determining the intensity distribution of a measuring beam reflected from the surface as a function of a focus position relative to the object surface. A simple measurement even of highly inaccessible locations on the test object is made possible by the fact that the measuring optics has an optical probe for generating at least one intermediate image (ZW) of the observed surface area (FIG.).

An interferometric measuring device for measuring the shape of a surface of an object having a radiation source which emits a short-coherent radiation, a beam splitter for forming an object beam which is directed via an object light path to the object, and a reference beam which is directed via a reference light path to a reflective reference plane, and having an image converter which picks up the radiation reflected back by the surface and the reference plane and brought to interference, and sends it to an analyzing device for determining a measuring result pertaining to the surface, the optical length of the object light path being changed relative to the optical length of the reference light path for analyzing the interference peak.

An interferometric measuring device for measuring the shape of a surface of an object has a radiation source which emits a short-coherent radiation, a beam splitter for forming an object beam which is directed via an object light path to the object and a reference beam which is directed via a reference light path to a reflective reference plane. The interferometric measuring device also has an image converter which picks up the radiation that has been brought to interference and reflected back from the surface and the reference plane and sends it to an analyzing device for determining a measurement result pertaining to the surface. To analyze the interference peak by scanning, the optical length of the object light path is altered relative to the optical length of the reference light path, or an intermediate image of the surface produced in the object light path is scanned. A rapid and accurate measurement of spatially separated surfaces is achieved by situating a superposition optics in the object light path for producing simultaneously an image of the one surface and of at least one additional surface; at least one additional reference plane being situated in the reference light path according to the number of additional surface(s) for producing different optical lengths in the reference light path, and the radiation which is brought to interference and is reflected back by the at least one additional surface and by the respective additional reference plane and is scanned with regard to the interference peak is also sent to the image converter and is analyzed in the analyzing device to determine the measurement result.

Interferometric, low coherence shape measurement device for a plurality of surfaces (valve seat) via several reference planes

The present invention relates to a interferometric measuring device for measuring the shape especially of rough surfaces of a measured object (O), having a radiation-producing unit (SLD) emitting short-coherent radiation, a beam splitter (ST ) for forming a first and a second beam component (T , T ), of which the first is directed via an object light path to the measured object (O), and the second is directed via a reference light path to a reflecting reference plane (RSP), having a superposition element at which the radiation coming from the measured object (O) and the reference plane (RSP) are brought to superposition, and an image converter (BS), which receives the superposed radiation and sends corresponding signals to a device for evaluation, for the measurement to be taken, the optical path length of the object light path being changed relative to the optical path length of the reference light path. An exact measuring of object surfaces in narrow cavities, in three dimensions, having great accuracy, is made possible by providing in the optical light path an optical probe (OS, OSO) having an optical arrangement for producing at least one optical intermediate image.

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Leutenbach, Germany

Michael Lindner