Infineon Technologies Sc300 Gmbh & Co., Kg

Other

Motorola Corporation

Infineon Technologies Ag

Michael Lering

Sven Hahn

Martin Peiter

Clinton Haris

Gregor Kübart

Volker Tegeder

Reiner Missale

Gregor Kuebart

Christoph Hocke

Mathias Schulz

An installation for processing a semiconductor wafer includes a semiconductor fabrication device having a load port, on which an identity code that can be read optically or through an effective electromagnetic field is stored. A mobile device, for example, a container communicating with the load port or a vehicle for transporting such a container, contains a corresponding reader to determine the identifier. The configuration makes the flexible determination of position within a fabrication facility possible. Also provided is a method for operating the installation.

Installation for processing a semiconductor wafer and method for operating the installation

An apparatus for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs, has at least one cleaning unit and at least one storage unit for the carriers containing the disk-shaped items. The apparatus further has at least one sorting unit for the disk-shaped items. The cleaning unit, the storage unit and the sorting apparatus are integral component parts of the apparatus and are operated by a common automatic control.

Apparatus and method for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs

A vehicle for transporting semiconductor devices is used for servicing loadports of semiconductor processing tools with device carriers by use of a portal hoist. Thereby, the vehicle contains an empty inner space and an open front side, such that the loadport is enclosed by the vehicle, when it approaches and docks to the loadport. Time for loading is shortened, complexity of structure and procedure is reduced and cleanroom space is saved.

Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool

A light curtain system is provided for establishing a protective light curtain for a tool in a system for processing objects such as wafers, and is particularly provided as a safety device for an operator of the tool. The light curtain system includes a first light curtain component of invisible light beams. A receiver and an emitter form edges of the protective light curtain from the invisible light beams. In addition, a second light curtain component of visible light beams is provided. The visible light beams are directed and transmitted adjacent and in parallel to the light beams of invisible light for forming a part of the protective light curtain and for making the protective light curtain visible for an operator. The second light curtain component of visible light beams is activated at least temporarily.

Light curtain system for establishing a protective light curtain, tool and system for processing objects and method for loading/unloading a tool

A conveyor element ( ) for conveying wafer receptacles between a conveyor ( ) and a loading station ( ) of a manufacturing system in the semiconductor industry has a lifting mechanism ( ) to move the wafer receptacle from a first position of the conveyor ( ) or the loading station ( ) into a second position of the conveyor ( ) or of the loading station ( ) substantially in a vertical direction. Rollers ( ) are provided to move the wafer receptacle from the second position of the conveyor ( ) along a substantially horizontal direction to the second position of the loading station ( ) or from the second position of the loading station ( ) to the second position of the conveyor ( ).

Conveying element and conveyor means for conveying wafer receptacles, and method

A transportation system ( ) has a wafer container ( ), such as a FOUP, to rest on a support surface ( ). The container has kinematic coupling grooves, and the support surface has kinematic coupling pins. Grooves and pins are at least partially electrically conductive and allow coupling an electric device ( ) associated with the container to an electrical circuit ( ) associated with the support surface. Device and circuit in combination allow to perform a variety of functions, such as monitoring the correct position of the container, and exchanging signals.

Wafer container having electrically conductive kinematic coupling groove, support surface with electrically conductive kinematic coupling pin, transportation system, and method

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Bubenreuth, Germany

Michael Lering