Sonix, Inc.

Michael Lemley Wright

Paul Ivan John Keeton

James Christopher Patrick McKeon

Kevin John Brault

James Christopher Patrick Mckeon

A wafer chuck includes a support structure having a first side structurally configured to support a wafer, and a vacuum zone formed on the first side of the support structure. The vacuum zone may be at least partially bounded by a ring extending from a recessed surface of the first side of the support structure. The wafer chuck further includes a plurality of suction cups disposed in the vacuum zone, where one or more of the plurality of suction cups is coupled with a channel extending through the support structure. One or more vacuums are in fluid communication with the channel, where a vacuum is structurally configured to provide suction through the channel.

Wafer chuck

An adjustable fixture for holding a sample for inspection with a scanning acoustic microscope includes a first horizontal bar disposed on a first end of a frame, and a second horizontal bar disposed on a second end of the frame. The second horizontal bar may be engaged with the frame to be movable between the first end and the second end of the frame. The adjustable fixture may further include a side bar disposed on one or more of the first side and the second side of the frame, with an end of the second horizontal bar slidable and lockable along the side bar, and an engagement mechanism releasably coupling the end of the second horizontal bar to the side bar.

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Fredericksburg, VA, United States of America

Michael Lemley Wright