Tektronix, Inc.

Other

Ateq Corporation

Avant! Corporation

Michael L Rieger

John P Stirniman

Matthew J Jolley

Kenneth G Schlotzhauer

Paul A Warkentin

Carl R Battjes

Harvey Leon Golladay

Benjamin E McCann

Binoy Anthony Rosario

Chris A Michalski

Martin D Singer

A system for computing a pattern function for a polygonal pattern having a finite number of predetermined face angles. One method includes the steps of decomposing the polygon into a set of flashes, computing the pattern function by summing together all flashes evaluated at a point (x,y), and the pattern function returning a,if point (x,y) is inside a polygon and otherwise will return a,Another method for computing a two-dimensional convolution value for any point (x,y) on a polygonal pattern includes the steps of identifying a set of half-plane basis functions corresponding to each face angle of the polygonal pattern, convolving each half-plane basis function with a convolution kernel using integration to find convolved flash (cflash) x,y values, storing the cflash (x,y) values to a two-dimensional look-up table, decomposing the polygonal pattern into a set of flashes where each of the flashes is an instance of the half-plane basis functions, and computing a convolution value for point (x,y) by looking-up a corresponding cflash x,y value for each flash in the table and summing together the corresponding cflash x,y values. The present invention may be used in a method for determining correction steps to which a design layout is to be subjected during wafer proximity correction.

Proximity correction software for wafer lithography

A system for computing a pattern function for a polygonal pattern having a finite number of predetermined face angles. One method includes the steps of decomposing the polygon into a set of flashes, computing the pattern function by summing together all flashes evaluated at a point (x,y), and the pattern function returning a 1 if point (x,y) is inside a polygon and otherwise will return a 0. Another method for computing a two-dimensional convolution value for any point (x,y) on a polygonal pattern includes the steps of identifying a set of half-plane basis functions corresponding to each face angle of the polygonal pattern, convolving each half-plane basis function with a convolution kernel using integration to find convolved flash (cflash) x,y values, storing the cflash (x,y) values to a two-dimensional look-up table, decomposing the polygonal pattern into a set of flashes where each of the flashes is an instance of the half-plane basis functions, and computing a convolution value for point (x,y) by looking-up a corresponding cflash x,y value for each flash in the table and summing together the corresponding cflash x,y values. The present invention may be used in a method for determining correction steps to which a design layout is to be subjected during wafer proximity correction.

Proximity correction system for wafer lithography

A method and apparatus for providing improved address resolution in a rasterization system. The rasterization system of the present invention comprises a pattern database, a pattern delivery computer, a rasterizer and a radiant energy system in which a plurality of logical passes are made across a substrate to produce photolithographically formed patterns. The plurality of passes use a combination of offset printing techniques and application of energy to photosensitive material at a plurality of intensities to provide improved address resolution.

Rasterization system utilizing an overlay of bit-mapped low address

An automatic picture coding system including a method for converting a bit-map image of the picture to vectors as the picture is being scanned. The bit map is delayed as it is being generated to form a series of tessellations or windows of data. The windows are propagated through a series of neighborhood-logic elements which perform data transformation operations such as growing, smoothing and thinning of the bit-map image. A bit stream output from the neighborhood logic which output includes only line and edge features of the original picture is transferred serially to a microcomputer where the features are partitioned into a plurality of line segments. Each line segment is chain coded and temporarily stored, as it is acquired, in a corresponding one of a plurality of lists, the lists being linked in an order corresponding with the order in which the segments are acquired. When the storage of each chain-coded segment is completed, the segment is converted to vectors and transmitted to a user device for display, storage, or further processing, the lists in which the converted segments were stored being unlinked and deallocated. The process is continued until the entire document has been scanned and converted to vectorial data.

Method of pixel to vector conversion in an automatic picture coding

A matrix multiplier is disclosed for rotating, scaling, shearing, and stretching, three-dimensional calligraphic images. This system has particular application to incremental vector generators. The transformations are performed in real time and at the drawing rate of the display device (CRT, plotter, etc.). Complex curved images are transformed as quickly as straight lines. This system reduces matrix multiplication to incremental additions distributed along each line of an image as it is drawn.

Graphics matrix multiplier

A circuit for attenuating undesired electrical aberrations associated with digital-to-analog converters is provided. Specifically, the circuit is a non-linear filter for attenuating undesired false or spurious electronic signals superimposed on the output waveform of a digital-to-analog converter when the digital word input signal is changed.

Filter for digital-to-analog converter

A Constant Velocity Vector Generator is disclosed for connecting X, Y coordinate points of a rectangular coordinate display system. A pair of absolute value amplifier circuits, a square-root-of-the-sum-of-the-squares circuit, a pair of dividers, and a pair of integrators are employed to convert simultaneous .DELTA.X and .DELTA.Y step voltages to ramp voltage pairs which are applied to appropriate X and Y deflection circuits of a graphic display device to produce straight-line traces whose velocities are constant for all vectors regardless of magnitude (line length) or direction (angle). Each vector may be drawn to any length or direction, immediately after which new data may be applied to the vector generator to initiate a new vector whose origin is the end point of the preceding vector. Such a system is particularly applicable to computer-drawn displays. The vector generating circuits are suitable for realization in a monolithic integrated circuit.

Integrator circuits for a constant velocity vector generator

Constant velocity vector generator employing absolute value amplifier

A circuit to correct for pincushion distortion and defocusing in a cathode-ray tube having electromagnetic deflection systems is disclosed. The circuit, which may be realized in monolithic integrated-circuit form, performs a mathematical function to predistort the deflection signal for each axis by the amount necessary to provide an undistorted display. The circuit also provides a signal to correct for the defocusing that occurs at the edges of the screen. The circuit may be readily adapted for use with cathode-ray tubes having different diagonal deflection angles, and with either flat of curved faceplates, by changing the values of two resistors.

Geometry and focus correction circuit

A Constant Velocity Vector Generator is disclosed for connecting X, Y coordinate points of a rectangular coordinate display system. Simultaneous .DELTA.X and .DELTA.Y step voltages are converted to ramp voltage pairs which are applied to appropriate X and Y deflection circuits of a graphic display device to produce straight-line traces whose velocities are constant for all vectors regardless of magnitude (line length) or direction (angle). Each vector may be drawn to any length or direction, immediately after which new data may be applied to the vector generator to initiate a new vector whose origin is the end point of the preceding vector. Such a system is particularly applicable to computer-drawn displays. The vector generating circuits are suitable for realization in a monolithic integrated circuit.

Growing community of inventors

Portland, OR, United States of America

Michael L Rieger