Entegris, Inc.

Michael L Johnson

John A Leys

Matthew Kusz

John M Hennen

Anthony Mathius Tieben

David L Halbmaier

Steven P Kolbow

John Lystad

Huaping Wang

Christian Andersen

Michael A Cisewski

Kevin McMullen

Barry L Rauworth

Carlos Cadavid

Ronald E Thomas, Jr

Andrews Harris

A bag-in-bag-in-bottle assembly formed by a flexible dispensing container with a dispensing fitment. The dispensing container is positioned adjacent or sandwiched between one or more flexible pressurization containers having a separate inlet/outlet path through a second fitment. The bag-in-bag assembly can then be placed in a containment vessel with the fitments mounted such that it is accessible on the vessel. A liquid can be extracted from the dispensing container by introducing a fluid into the pressurization container(s) with enough pressure to force the liquid out through the dispensing fitment. A contoured dispensing head may be coupled to the bag-in-bag-in-bottle assembly using a cam actuation arrangement for simultaneously locking the pressurization, vent and fluid extraction couplings.

Pressurized system for dispensing fluids

A bag-in-bag-in-bottle assembly formed by a flexible dispensing container with a dispensing fitment. The dispensing container is positioned adjacent or sandwiched between one or more flexible pressurization containers having a separate inlet/outlet path through a second fitment. The bag-in-bag assembly can then be placed in a containment vessel with the fitments mounted such that it is accessible on the vessel. A liquid can be extracted from the dispensing container by introducing a fluid into the pressurization container(s) with enough pressure to force the liquid out through the dispensing fitment. A contoured dispensing head may be coupled to the bag-in-bag-in-bottle assembly using a earn actuation arrangement for simultaneously locking the pressurization, vent and fluid extraction couplings.

A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.

Reticle pod

A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint. Dual containment pod embodiment provides further isolation and protection.

A container suitable for storing and transporting photomasks and including a container body, a cover, first and second cushions and left and right channels disposed in slots formed in the container body. In one embodiment, the container of this invention is formed in a one-piece design by rotomolding. The cover is subsequently separated from the body and machined so as to provide a slidingly sufficient seal and disposed therein.

Photomask container

A cassette system for disks to be manufactured into hard disks for computer memory storage includes a pair of end portions and a pair of side wall portions spanning between the end portions, defining a disk receiving region. The side wall portions together define a plurality of axially aligned slots for holding the disks. At least one of the end portions includes a test disk receiver, which may be a slot or pocket.

Growing community of inventors

Minneapolis, MN, United States of America

Michael L Johnson