Saes Getters S.p.a.

Michael L Ferris

Claudio Boffito

Alessio Corazza

Alessandro Gallitognotta

Richard C Kullberg

Andrea Conte

A combined pumping system comprises a getter pump and an ion pump. The getter and ion pumps are mounted on a same flange and are arranged on the same side of the flange at two different points thereof. The flange can be mounted to a vacuum chamber, such that the combined pumping system evacuates the vacuum chamber.

Combined pumping system comprising a getter pump and an ion pump

A method for forming a supported thin layer of non-evaporable getter (NEG) material and a getter device formed thereby are provided. A suspension comprised of non-evaporable getter (NEG) material particles in a dispersing medium is prepared. The NEG material particles in the suspension have a particle size not greater than about 150 .mu.m. The dispersing medium has an aqueous, alcoholic, or hydroalcoholic base and contains not more than about 1 wt % of organic compounds having a boiling temperature of at least about 250.degree. C. The ratio of the weight of the NEG material particles to the weight of the dispersing medium is between about 4:1 and about 1:1. A layer of the suspension is deposited on a carrier by a serigraphic technique. Next, the deposited layer is dried to evaporate volatile components of the dispersing medium and thereby form a dried deposit. Finally, the dried deposit is sintered under vacuum at a temperature between about 800.degree. C. and 1000.degree. C. with a surface of the dried deposit covered with a refractory material to inhibit scaling. Getter devices formed in accordance with this method also are provided.

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Colorado Springs, CO, United States of America

Michael L Ferris