Zygo Corporation

Carl-zeiss-smt Ag

Kuechel, Michael

Michael Kuechel

Daniel M Sykora

Michael Arnz

Christopher James Evans

Uwe Schellhorn

Matthew James Van Doren

Joachim Heppner

Juergen Massig

Juergen Penzing

Matthew Van Doren

In-situ calibration of an interferometer includes making a sequence of phase measurements of a test object using the interferometer, each of the measurements having a same carrier fringe frequency, where at least some of the measurements are made at three or more different orientations of carrier fringes, and determining information about the test object based on at least some of the phase measurements, in which determining the information includes reducing errors in the measurements arising from imperfections in the interferometer based on the measurements made at the three or more different orientations.

In situ calibration of interferometers

The instant invention is a method and apparatus for the measurement, with low uncertainty, of the six degrees of freedom of a first structure relative to a second structure. The apparatus is comprised of compact, rigid, thermally stable structures. The invention uses linear displacement transducers which have no active pointing to maintain a desired orientation of the linear displacement transducers with other parts of the measurement system.

Metrology system for precision 3D motion

In a moir&eacute; method for measuring the distortion of an optical imaging system in which and object grid having a two-dimensional object pattern is arranged in an object plane of the imaging system and an image grid having a two-dimensional image pattern is arranged in an image plane of the imaging system, these patterns are configured in the form of, for example cross-hatched patterns or checker board patterns, are adapted to suit one another such that a two-dimensional moir&eacute; fringe pattern that may be detected by a two-dimensional, spatially resolving, detection device is created when the object grid is imaged onto the image grid using the imaging system. Distortion components of the imaging system may be simultaneously determined along two differently oriented, in particular, two mutually orthogonal, image directions from a two-dimensional moir&eacute; fringe pattern.

Moir&eacute; method and a system for measuring the distortion of an optical imaging system

Growing community of inventors

Oberkochen, Germany

Michael Kuechel