Horiba Stec, Co., Ltd.

Michael Kramer

Patrick Allen Lowery

John Thomas Dick

Tadahiro Yasuda

Daniel Thomas Mudd

William W White

To provide a flow rate characteristic function identification method, flow rate sensor, and flow rate characteristic function identification program that can set a flow rate characteristic function reflecting not only the type or shape of a fluid resistance but also the effects of states such as an attachment state of the fluid resistance, and calculate a flow rate with higher accuracy. An actual flow rate characteristic function, which is a flow rate characteristic function when an actual fluid resistance is provided in a flow path, is identified on the basis of multiple flow rate characteristic functions including a first reference flow rate characteristic function and a second reference flow rate characteristic function, and predetermined weighting.

Flow rate characteristic function identification method, flow rate characteristic function identification device, storage medium storing flow rate characteristic function identification program, and flow rate sensor or flow rate control device using them

A micro-position gap sensor assembly, including a structural housing, a flexible diaphragm fixedly attached at a first end of the structural housing, and a shaft orthogonally attached to the flexible diaphragm. The micro-position gap sensor assembly may further include a first retainer coupled to the shaft, a second retainer formed as a step of the structural housing, and a plate gap sensor. The plate gap sensor may include a non-contact sensor plate biased by a compression spring so that the non-contact sensor plate is held against a portion of the second retainer. The plate gap sensor may further include a target plate positioned adjacent the non-contact sensor plate and separated therefrom by a gap. The target plate may be biased by a return spring so that the target plate is held against a portion of the first retainer. The target plate may be coupled to the shaft.

Micro-position gap sensor assembly

A micro-position gap sensor assembly including a structural housing and a flexible diaphragm fixedly attached forming a barrier against fluid ingress. The structural housing includes a shaft orthogonally attached to the flexible diaphragm, a first retainer including one or more standoffs, a second retainer, and a parallel plate gap sensor. The parallel gap plate sensor includes a non-contact sensor plate biased against a portion of the first retainer defining a plane of the non-contact sensor plate and receiving a biasing force in opposition of the first retainer from the second retainer, a target plate comprised of a conductive paramagnetic material. The parallel plate gap sensor is configured such that displacement of one of the target plate or the non-contact sensor plate changes a distance between the target plate and the non-contact sensor plate.

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Sparks, NV, United States of America

Michael Kramer